Single-walled carbon nanotube growth from ion implanted Fe catalyst
- Department of Electrical and Computer Engineering, University of Florida, Gainesville, Florida 32611 (United States)
The authors present experimental evidence that single-walled carbon nanotubes can be grown by chemical vapor deposition from ion implanted iron catalyst. They systematically characterize the effect of ion implantation dose and energy on the catalyst nanoparticles and nanotubes formed at 900 deg. C. They also fabricate a micromachined silicon grid for direct transmission electron microscopy characterization of the as-grown nanotubes. This work opens up the possibility of controlling the origin of single-walled nanotubes at the nanometer scale and of integrating them into nonplanar three-dimensional device structures with precise dose control.
- OSTI ID:
- 20860999
- Journal Information:
- Applied Physics Letters, Vol. 89, Issue 15; Other Information: DOI: 10.1063/1.2360889; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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