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Title: Comparison of atmospheric-pressure helium and argon plasmas generated by capacitively coupled radio-frequency discharge

Abstract

In this paper, the electrical discharge characteristics of plasmas generated in coaxial cylindrical electrodes capacitively powered by a radio-frequency power supply at atmospheric pressure are investigated with respect to helium and argon gases. The electrical discharge parameters, voltage (V), current (I), and power (P), are measured for both helium and argon plasmas, and the electron temperatures and electron densities for them are evaluated by means of the equivalent circuit model and the power balance equation. By comparison of the discharge characteristics of the helium and argon plasmas, it is found that the discrepant macroscopic characteristics of helium and argon plasma, viz., current and voltage characteristics and current and power characteristics, are owed to their own intrinsic microscopic parameters of the helium and argon atoms, such as the first excited energy, the ionization energy, the total cross section, and the atom mass. Furthermore, the influences of the additive gas, oxygen gas, on the electrical discharge characteristics are also investigated in the helium and argon plasmas, which are closely related to the electron temperature of plasmas.

Authors:
; ; ;  [1]
  1. State Key Laboratory of Materials Modification by Laser, Ion and Electron Beams and Department of Physics, Dalian University of Technology, Dalian 116024 (China)
Publication Date:
OSTI Identifier:
20860266
Resource Type:
Journal Article
Journal Name:
Physics of Plasmas
Additional Journal Information:
Journal Volume: 13; Journal Issue: 9; Other Information: DOI: 10.1063/1.2355428; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1070-664X
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ARGON; ATMOSPHERIC PRESSURE; ATOMS; COMPARATIVE EVALUATIONS; CURRENTS; CYLINDRICAL CONFIGURATION; ELECTRIC POTENTIAL; ELECTRODES; ELECTRON DENSITY; ELECTRON TEMPERATURE; EQUIVALENT CIRCUITS; HELIUM; HIGH-FREQUENCY DISCHARGES; ION TEMPERATURE; IONIZATION; OXYGEN; PLASMA; PLASMA DENSITY; PLASMA DIAGNOSTICS; RADIATION TRANSPORT; RADIOWAVE RADIATION; TOTAL CROSS SECTIONS

Citation Formats

Li, S -Z, Lim, J -P, Kang, Jung G, Uhm, Han S, and Department of Molecular Science and Technology, Ajou University, San 5 Wonchon-Dong, Youngtong-Gu, Suwon 443-749. Comparison of atmospheric-pressure helium and argon plasmas generated by capacitively coupled radio-frequency discharge. United States: N. p., 2006. Web. doi:10.1063/1.2355428.
Li, S -Z, Lim, J -P, Kang, Jung G, Uhm, Han S, & Department of Molecular Science and Technology, Ajou University, San 5 Wonchon-Dong, Youngtong-Gu, Suwon 443-749. Comparison of atmospheric-pressure helium and argon plasmas generated by capacitively coupled radio-frequency discharge. United States. https://doi.org/10.1063/1.2355428
Li, S -Z, Lim, J -P, Kang, Jung G, Uhm, Han S, and Department of Molecular Science and Technology, Ajou University, San 5 Wonchon-Dong, Youngtong-Gu, Suwon 443-749. 2006. "Comparison of atmospheric-pressure helium and argon plasmas generated by capacitively coupled radio-frequency discharge". United States. https://doi.org/10.1063/1.2355428.
@article{osti_20860266,
title = {Comparison of atmospheric-pressure helium and argon plasmas generated by capacitively coupled radio-frequency discharge},
author = {Li, S -Z and Lim, J -P and Kang, Jung G and Uhm, Han S and Department of Molecular Science and Technology, Ajou University, San 5 Wonchon-Dong, Youngtong-Gu, Suwon 443-749},
abstractNote = {In this paper, the electrical discharge characteristics of plasmas generated in coaxial cylindrical electrodes capacitively powered by a radio-frequency power supply at atmospheric pressure are investigated with respect to helium and argon gases. The electrical discharge parameters, voltage (V), current (I), and power (P), are measured for both helium and argon plasmas, and the electron temperatures and electron densities for them are evaluated by means of the equivalent circuit model and the power balance equation. By comparison of the discharge characteristics of the helium and argon plasmas, it is found that the discrepant macroscopic characteristics of helium and argon plasma, viz., current and voltage characteristics and current and power characteristics, are owed to their own intrinsic microscopic parameters of the helium and argon atoms, such as the first excited energy, the ionization energy, the total cross section, and the atom mass. Furthermore, the influences of the additive gas, oxygen gas, on the electrical discharge characteristics are also investigated in the helium and argon plasmas, which are closely related to the electron temperature of plasmas.},
doi = {10.1063/1.2355428},
url = {https://www.osti.gov/biblio/20860266}, journal = {Physics of Plasmas},
issn = {1070-664X},
number = 9,
volume = 13,
place = {United States},
year = {2006},
month = {9}
}