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Title: Characterization of neutral beam source based on pulsed inductively coupled discharge: Time evolution of ion fluxes entering neutralizer

Abstract

Low-energy neutral beam sources are very promising candidates for realization of next generation ultralarge-scale integrated devices. The use of pulsed inductively coupled plasma and surface (wall) neutralizer appears to be an efficient way of producing high-flux low-energy neutral beams. Measurement of the time evolution of ion fluxes entering the neutralizer plays an essential role in understanding and control of these neutral beam systems. Here the authors present a simple method for measuring the temporal dynamics of ion fluxes in neutral beam source described elsewhere [S. Samukawa et al., J. Vac. Sci. Technol. A 20, 1566 (2002)]. The method is based on the use of a low aspect ratio orifice in the center of neutralizer, magnetic filter, and Faraday cup. At some conditions, it allows (1) to measure the magnitudes of positive and negative wall ion fluxes in pulsed plasmas with an extremely high temporal resolution (better than 1 {mu}s) and (2) to examine the difference in surface neutralization between positive and negative ions. The measurements show that neutralization of hyperthermal ions is mainly controlled by geometry of plasma sheath adjacent to the surface neutralizer; however, negative ions are neutralized more easily than positive ones. The experimental results for SF{sub 6}more » (ion-ion) and Ar plasmas in combination with dc/rf bias are reported.« less

Authors:
; ;  [1]
  1. Institute of Fluid Science, Tohoku University, Katahira 2-1-1, Aoba-ku, Sendai 980-8577 (Japan)
Publication Date:
OSTI Identifier:
20853941
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films; Journal Volume: 25; Journal Issue: 1; Other Information: DOI: 10.1116/1.2402154; (c) 2007 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ANIONS; BEAM NEUTRALIZATION; FARADAY CUPS; ION BEAMS; MAGNETIC FILTERS; NEUTRAL BEAM SOURCES; ORIFICES; PLASMA; PLASMA SHEATH; SURFACES

Citation Formats

Abolmasov, Sergey N., Ozaki, Takuya, and Samukawa, Seiji. Characterization of neutral beam source based on pulsed inductively coupled discharge: Time evolution of ion fluxes entering neutralizer. United States: N. p., 2007. Web. doi:10.1116/1.2402154.
Abolmasov, Sergey N., Ozaki, Takuya, & Samukawa, Seiji. Characterization of neutral beam source based on pulsed inductively coupled discharge: Time evolution of ion fluxes entering neutralizer. United States. doi:10.1116/1.2402154.
Abolmasov, Sergey N., Ozaki, Takuya, and Samukawa, Seiji. Mon . "Characterization of neutral beam source based on pulsed inductively coupled discharge: Time evolution of ion fluxes entering neutralizer". United States. doi:10.1116/1.2402154.
@article{osti_20853941,
title = {Characterization of neutral beam source based on pulsed inductively coupled discharge: Time evolution of ion fluxes entering neutralizer},
author = {Abolmasov, Sergey N. and Ozaki, Takuya and Samukawa, Seiji},
abstractNote = {Low-energy neutral beam sources are very promising candidates for realization of next generation ultralarge-scale integrated devices. The use of pulsed inductively coupled plasma and surface (wall) neutralizer appears to be an efficient way of producing high-flux low-energy neutral beams. Measurement of the time evolution of ion fluxes entering the neutralizer plays an essential role in understanding and control of these neutral beam systems. Here the authors present a simple method for measuring the temporal dynamics of ion fluxes in neutral beam source described elsewhere [S. Samukawa et al., J. Vac. Sci. Technol. A 20, 1566 (2002)]. The method is based on the use of a low aspect ratio orifice in the center of neutralizer, magnetic filter, and Faraday cup. At some conditions, it allows (1) to measure the magnitudes of positive and negative wall ion fluxes in pulsed plasmas with an extremely high temporal resolution (better than 1 {mu}s) and (2) to examine the difference in surface neutralization between positive and negative ions. The measurements show that neutralization of hyperthermal ions is mainly controlled by geometry of plasma sheath adjacent to the surface neutralizer; however, negative ions are neutralized more easily than positive ones. The experimental results for SF{sub 6} (ion-ion) and Ar plasmas in combination with dc/rf bias are reported.},
doi = {10.1116/1.2402154},
journal = {Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films},
number = 1,
volume = 25,
place = {United States},
year = {Mon Jan 15 00:00:00 EST 2007},
month = {Mon Jan 15 00:00:00 EST 2007}
}