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Title: Thermal and Electromigration-Induced Strains in Polycrystalline Films and Conductor Lines: X-ray Microbeam Measurements and Analysis

Abstract

X-ray microbeam measurements of thermal and electromigration-induced strains have been made at NSLS using white-beam energy dispersive x-ray diffraction, averaging over many grains, and at APS using white-beam Laue x-ray diffraction, from single grains. Grain-by-grain deviatoric strain measurements in Al films show wide variation in behavior for different grains in the films. Room temperature relaxation of residual strains was observed to occur at different rates for Al films with different bonding layers and substrates. X-ray microbeam measurements of strain development during electromigration for Cu and Al conductor lines show that strain gradients do not develop in the copper lines under conditions similar to those for which large strain gradients have been seen for Al lines.

Authors:
; ; ;  [1];  [2]; ; ;  [3]
  1. Department of Materials Science and Engineering, Lehigh University, Bethlehem, PA 18015 (United States)
  2. IBM Research, Yorktown Hts., NY 10598 (United States)
  3. Condensed Matter Sciences Division., Oak Ridge National Lab., Oak Ridge, TN 37831 (United States)
Publication Date:
OSTI Identifier:
20798191
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 817; Journal Issue: 1; Conference: 8. international workshop on stress-induced phenomena in metallization, Dresden (Germany), 12-14 Sep 2005; Other Information: DOI: 10.1063/1.2173563; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ALUMINIUM; COPPER; ELECTROPHORESIS; LAYERS; POLYCRYSTALS; RELAXATION; STRAINS; SUBSTRATES; TEMPERATURE RANGE 0273-0400 K; THERMAL ANALYSIS; THIN FILMS; VARIATIONS; X-RAY DIFFRACTION

Citation Formats

Cargill, G. S. III, Moyer, L. E., Wang, G., Zhang, H., Hu, C.-K., Yang, W., Larson, B. C., and Ice, G. E. Thermal and Electromigration-Induced Strains in Polycrystalline Films and Conductor Lines: X-ray Microbeam Measurements and Analysis. United States: N. p., 2006. Web. doi:10.1063/1.2173563.
Cargill, G. S. III, Moyer, L. E., Wang, G., Zhang, H., Hu, C.-K., Yang, W., Larson, B. C., & Ice, G. E. Thermal and Electromigration-Induced Strains in Polycrystalline Films and Conductor Lines: X-ray Microbeam Measurements and Analysis. United States. doi:10.1063/1.2173563.
Cargill, G. S. III, Moyer, L. E., Wang, G., Zhang, H., Hu, C.-K., Yang, W., Larson, B. C., and Ice, G. E. Tue . "Thermal and Electromigration-Induced Strains in Polycrystalline Films and Conductor Lines: X-ray Microbeam Measurements and Analysis". United States. doi:10.1063/1.2173563.
@article{osti_20798191,
title = {Thermal and Electromigration-Induced Strains in Polycrystalline Films and Conductor Lines: X-ray Microbeam Measurements and Analysis},
author = {Cargill, G. S. III and Moyer, L. E. and Wang, G. and Zhang, H. and Hu, C.-K. and Yang, W. and Larson, B. C. and Ice, G. E.},
abstractNote = {X-ray microbeam measurements of thermal and electromigration-induced strains have been made at NSLS using white-beam energy dispersive x-ray diffraction, averaging over many grains, and at APS using white-beam Laue x-ray diffraction, from single grains. Grain-by-grain deviatoric strain measurements in Al films show wide variation in behavior for different grains in the films. Room temperature relaxation of residual strains was observed to occur at different rates for Al films with different bonding layers and substrates. X-ray microbeam measurements of strain development during electromigration for Cu and Al conductor lines show that strain gradients do not develop in the copper lines under conditions similar to those for which large strain gradients have been seen for Al lines.},
doi = {10.1063/1.2173563},
journal = {AIP Conference Proceedings},
number = 1,
volume = 817,
place = {United States},
year = {Tue Feb 07 00:00:00 EST 2006},
month = {Tue Feb 07 00:00:00 EST 2006}
}