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Title: Strain Energy Effects on Texture Evolution in Thin Films: Biaxial vs. Uniaxial Stress State

Abstract

Grain growth in thin films is usually accompanied by texture evolution due to the crystallographic dependencies of surface, interface and strain energies. In this work the driving forces for grain growth for a 1 and 5 {mu}m thick Cu thin film on a polyimide substrate are calculated assuming biaxial and uniaxial stress. While the results for the biaxial stress state are used to explain observed textures, for the case of uniaxial stress predictions suggest new ways to control the texture of thin films.

Authors:
 [1];  [2];  [3];  [1]
  1. Max Planck Institute for Metal Research, Heisenbergstrasse 3, 70569 Stuttgart (Germany)
  2. Department Material Physics, University of Leoben, Jahnstrasse 12, 8700 Leoben (Austria)
  3. Institute for Physical Metallurgy, University of Stuttgart, Heisenbergstrasse 3, 70569 Stuttgart (Germany)
Publication Date:
OSTI Identifier:
20798177
Resource Type:
Journal Article
Journal Name:
AIP Conference Proceedings
Additional Journal Information:
Journal Volume: 817; Journal Issue: 1; Conference: 8. international workshop on stress-induced phenomena in metallization, Dresden (Germany), 12-14 Sep 2005; Other Information: DOI: 10.1063/1.2173549; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0094-243X
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; COPPER; EVOLUTION; GRAIN GROWTH; INTERFACES; STRAINS; STRESSES; SUBSTRATES; SURFACES; TEXTURE; THIN FILMS

Citation Formats

Sonnweber-Ribic, P, Dehm, G, Erich Schmid Institute for Materials Science, Austrian Academy of Sciences, Jahnstrasse 12, 8700 Leoben, Gruber, P, Arzt, E, and Institute for Physical Metallurgy, University of Stuttgart, Heisenbergstrasse 3, 70569 Stuttgart. Strain Energy Effects on Texture Evolution in Thin Films: Biaxial vs. Uniaxial Stress State. United States: N. p., 2006. Web. doi:10.1063/1.2173549.
Sonnweber-Ribic, P, Dehm, G, Erich Schmid Institute for Materials Science, Austrian Academy of Sciences, Jahnstrasse 12, 8700 Leoben, Gruber, P, Arzt, E, & Institute for Physical Metallurgy, University of Stuttgart, Heisenbergstrasse 3, 70569 Stuttgart. Strain Energy Effects on Texture Evolution in Thin Films: Biaxial vs. Uniaxial Stress State. United States. https://doi.org/10.1063/1.2173549
Sonnweber-Ribic, P, Dehm, G, Erich Schmid Institute for Materials Science, Austrian Academy of Sciences, Jahnstrasse 12, 8700 Leoben, Gruber, P, Arzt, E, and Institute for Physical Metallurgy, University of Stuttgart, Heisenbergstrasse 3, 70569 Stuttgart. Tue . "Strain Energy Effects on Texture Evolution in Thin Films: Biaxial vs. Uniaxial Stress State". United States. https://doi.org/10.1063/1.2173549.
@article{osti_20798177,
title = {Strain Energy Effects on Texture Evolution in Thin Films: Biaxial vs. Uniaxial Stress State},
author = {Sonnweber-Ribic, P and Dehm, G and Erich Schmid Institute for Materials Science, Austrian Academy of Sciences, Jahnstrasse 12, 8700 Leoben and Gruber, P and Arzt, E and Institute for Physical Metallurgy, University of Stuttgart, Heisenbergstrasse 3, 70569 Stuttgart},
abstractNote = {Grain growth in thin films is usually accompanied by texture evolution due to the crystallographic dependencies of surface, interface and strain energies. In this work the driving forces for grain growth for a 1 and 5 {mu}m thick Cu thin film on a polyimide substrate are calculated assuming biaxial and uniaxial stress. While the results for the biaxial stress state are used to explain observed textures, for the case of uniaxial stress predictions suggest new ways to control the texture of thin films.},
doi = {10.1063/1.2173549},
url = {https://www.osti.gov/biblio/20798177}, journal = {AIP Conference Proceedings},
issn = {0094-243X},
number = 1,
volume = 817,
place = {United States},
year = {2006},
month = {2}
}