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Title: Thickness-dependent properties of FeTaN thin films deposited on flexible substrate

Abstract

The FeTaN thin films were deposited on the flexible plastic substrates by rf magnetron sputtering. Good soft magnetic properties with coercivity <10 Oe have been obtained in the films with thickness <250 nm. Relatively high values of the complex permeability and ferromagnetic resonance frequency were obtained and they can be adjusted by changing the film thickness. However, compared to the films on the rigid substrate, a decrease of the permeability level and a shift of the resonance peak in the permeability spectra have been noticed for the films on the flexible substrate. The electric properties, including sheet resistance, resistivity, and magnetoresistance for the films with various thicknesses, have also been investigated.

Authors:
; ; ; ;  [1]
  1. Center for Superconducting and Magnetic Materials, Department of Physics, National University of Singapore, Singapore 117542 (Singapore)
Publication Date:
OSTI Identifier:
20787884
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 99; Journal Issue: 4; Other Information: DOI: 10.1063/1.2170588; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; COERCIVE FORCE; DEPOSITION; FERROMAGNETIC MATERIALS; FERROMAGNETIC RESONANCE; IRON NITRIDES; MAGNETIC SUSCEPTIBILITY; MAGNETORESISTANCE; PERMEABILITY; SPUTTERING; SUBSTRATES; TANTALUM NITRIDES; THICKNESS; THIN FILMS

Citation Formats

Liu, Z.W., Liu, Y., Yan, L., Tan, C.Y., and Ong, C.K. Thickness-dependent properties of FeTaN thin films deposited on flexible substrate. United States: N. p., 2006. Web. doi:10.1063/1.2170588.
Liu, Z.W., Liu, Y., Yan, L., Tan, C.Y., & Ong, C.K. Thickness-dependent properties of FeTaN thin films deposited on flexible substrate. United States. doi:10.1063/1.2170588.
Liu, Z.W., Liu, Y., Yan, L., Tan, C.Y., and Ong, C.K. Wed . "Thickness-dependent properties of FeTaN thin films deposited on flexible substrate". United States. doi:10.1063/1.2170588.
@article{osti_20787884,
title = {Thickness-dependent properties of FeTaN thin films deposited on flexible substrate},
author = {Liu, Z.W. and Liu, Y. and Yan, L. and Tan, C.Y. and Ong, C.K.},
abstractNote = {The FeTaN thin films were deposited on the flexible plastic substrates by rf magnetron sputtering. Good soft magnetic properties with coercivity <10 Oe have been obtained in the films with thickness <250 nm. Relatively high values of the complex permeability and ferromagnetic resonance frequency were obtained and they can be adjusted by changing the film thickness. However, compared to the films on the rigid substrate, a decrease of the permeability level and a shift of the resonance peak in the permeability spectra have been noticed for the films on the flexible substrate. The electric properties, including sheet resistance, resistivity, and magnetoresistance for the films with various thicknesses, have also been investigated.},
doi = {10.1063/1.2170588},
journal = {Journal of Applied Physics},
number = 4,
volume = 99,
place = {United States},
year = {Wed Feb 15 00:00:00 EST 2006},
month = {Wed Feb 15 00:00:00 EST 2006}
}