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Title: Spatial variation of plasma parameters and ion acceleration in an inductive plasma system

Abstract

Plasma parameters of inductively coupled plasma system with an annular plasma source have been studied experimentally. At low pressures (about 1 mTorr), electron temperature inside the plasma source is rather high (8-13 eV) and is much greater than in the diffusion (main) chamber (4-5 eV). The plasma potential inside the source is also much higher than in the main chamber. There is a rapid drop of the electron temperature and plasma potential at the boundary between the plasma source and the main chamber. The drop of the plasma potential at the boundary (about 20 V) means the existence of a strong axial electric field, which retards the electrons inside the plasma source and accelerates the ions from the source into the main chamber. Measurements of ion energy distributions in the main chamber volume reveal the existence of ions with kinetic energies about 15 eV.

Authors:
; ; ; ;  [1];  [2]
  1. Mechatronics and Manufacturing Technology Center, Samsung Electronics Co., Ltd., 416 Maetan-3Dong, Suwon City, Kyunggi-do 443-742 (Korea, Republic of)
  2. (SAIT), Kihung-Eup, Yongin City, Kyunggi-do 449-712 (Korea, Republic of)
Publication Date:
OSTI Identifier:
20787877
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 99; Journal Issue: 4; Other Information: DOI: 10.1063/1.2170419; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ACCELERATION; BOUNDARY LAYERS; ELECTRIC FIELDS; ELECTRON TEMPERATURE; ELECTRONS; ENERGY SPECTRA; EV RANGE 01-10; EV RANGE 10-100; ION TEMPERATURE; IONS; KINETIC ENERGY; PLASMA; PLASMA DIAGNOSTICS; PLASMA GUNS; PLASMA POTENTIAL

Citation Formats

Volynets, V.N., Park, Wontaek, Tolmachev, Yu.N., Pashkovsky, V.G., Yoo, Jinwoo, and Nano Fabrication Center, Samsung Advanced Institute of Technology. Spatial variation of plasma parameters and ion acceleration in an inductive plasma system. United States: N. p., 2006. Web. doi:10.1063/1.2170419.
Volynets, V.N., Park, Wontaek, Tolmachev, Yu.N., Pashkovsky, V.G., Yoo, Jinwoo, & Nano Fabrication Center, Samsung Advanced Institute of Technology. Spatial variation of plasma parameters and ion acceleration in an inductive plasma system. United States. doi:10.1063/1.2170419.
Volynets, V.N., Park, Wontaek, Tolmachev, Yu.N., Pashkovsky, V.G., Yoo, Jinwoo, and Nano Fabrication Center, Samsung Advanced Institute of Technology. Wed . "Spatial variation of plasma parameters and ion acceleration in an inductive plasma system". United States. doi:10.1063/1.2170419.
@article{osti_20787877,
title = {Spatial variation of plasma parameters and ion acceleration in an inductive plasma system},
author = {Volynets, V.N. and Park, Wontaek and Tolmachev, Yu.N. and Pashkovsky, V.G. and Yoo, Jinwoo and Nano Fabrication Center, Samsung Advanced Institute of Technology},
abstractNote = {Plasma parameters of inductively coupled plasma system with an annular plasma source have been studied experimentally. At low pressures (about 1 mTorr), electron temperature inside the plasma source is rather high (8-13 eV) and is much greater than in the diffusion (main) chamber (4-5 eV). The plasma potential inside the source is also much higher than in the main chamber. There is a rapid drop of the electron temperature and plasma potential at the boundary between the plasma source and the main chamber. The drop of the plasma potential at the boundary (about 20 V) means the existence of a strong axial electric field, which retards the electrons inside the plasma source and accelerates the ions from the source into the main chamber. Measurements of ion energy distributions in the main chamber volume reveal the existence of ions with kinetic energies about 15 eV.},
doi = {10.1063/1.2170419},
journal = {Journal of Applied Physics},
number = 4,
volume = 99,
place = {United States},
year = {Wed Feb 15 00:00:00 EST 2006},
month = {Wed Feb 15 00:00:00 EST 2006}
}