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Title: Suppression of current fluctuations in a crossed ExB field system for low-voltage plasma immersion treatment

Abstract

Plasma transport in a hybrid dc vacuum arc plasma source for ion deposition and plasma immersion treatment is considered. It is found that external crossed electric and magnetic fields near the substrate can significantly reduce the relative amplitude of ion current fluctuations I{sub f} at the substrate surface. In particular, I{sub f} decreases with the applied magnetic field when the bias voltage exceeds 300 V, thus allowing one to reduce the deviations from the rated process parameters. This phenomenon can be attributed to an interaction between the metal-plasma jet from the arc source and the discharge plasma in the crossed fields.

Authors:
; ; ;  [1];  [2];  [3];  [4]
  1. School of Physics, University of Sydney, Sydney NSW 2006 (Australia)
  2. (United States)
  3. (Australia)
  4. (Germany)
Publication Date:
OSTI Identifier:
20787775
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 99; Journal Issue: 1; Other Information: DOI: 10.1063/1.2136416; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; CHARGED-PARTICLE TRANSPORT; CROSSED FIELDS; DEPOSITION; ELECTRIC POTENTIAL; ELECTROMAGNETIC FIELDS; FLUCTUATIONS; ION IMPLANTATION; IONS; MAGNETIC FIELDS; METALS; PLASMA; PLASMA JETS; SUBSTRATES; WALL EFFECTS

Citation Formats

Levchenko, I., Keidar, M., Ostrikov, K., Yu, M.Y., Department of Aerospace Engineering, University of Michigan, Ann Arbor, Michigan 48109, School of Physics, University of Sydney, Sydney NSW 2006, and Institute for Theoretical Physics I, Ruhr University Bochum, Bochum 44780. Suppression of current fluctuations in a crossed ExB field system for low-voltage plasma immersion treatment. United States: N. p., 2006. Web. doi:10.1063/1.2136416.
Levchenko, I., Keidar, M., Ostrikov, K., Yu, M.Y., Department of Aerospace Engineering, University of Michigan, Ann Arbor, Michigan 48109, School of Physics, University of Sydney, Sydney NSW 2006, & Institute for Theoretical Physics I, Ruhr University Bochum, Bochum 44780. Suppression of current fluctuations in a crossed ExB field system for low-voltage plasma immersion treatment. United States. doi:10.1063/1.2136416.
Levchenko, I., Keidar, M., Ostrikov, K., Yu, M.Y., Department of Aerospace Engineering, University of Michigan, Ann Arbor, Michigan 48109, School of Physics, University of Sydney, Sydney NSW 2006, and Institute for Theoretical Physics I, Ruhr University Bochum, Bochum 44780. Sun . "Suppression of current fluctuations in a crossed ExB field system for low-voltage plasma immersion treatment". United States. doi:10.1063/1.2136416.
@article{osti_20787775,
title = {Suppression of current fluctuations in a crossed ExB field system for low-voltage plasma immersion treatment},
author = {Levchenko, I. and Keidar, M. and Ostrikov, K. and Yu, M.Y. and Department of Aerospace Engineering, University of Michigan, Ann Arbor, Michigan 48109 and School of Physics, University of Sydney, Sydney NSW 2006 and Institute for Theoretical Physics I, Ruhr University Bochum, Bochum 44780},
abstractNote = {Plasma transport in a hybrid dc vacuum arc plasma source for ion deposition and plasma immersion treatment is considered. It is found that external crossed electric and magnetic fields near the substrate can significantly reduce the relative amplitude of ion current fluctuations I{sub f} at the substrate surface. In particular, I{sub f} decreases with the applied magnetic field when the bias voltage exceeds 300 V, thus allowing one to reduce the deviations from the rated process parameters. This phenomenon can be attributed to an interaction between the metal-plasma jet from the arc source and the discharge plasma in the crossed fields.},
doi = {10.1063/1.2136416},
journal = {Journal of Applied Physics},
number = 1,
volume = 99,
place = {United States},
year = {Sun Jan 01 00:00:00 EST 2006},
month = {Sun Jan 01 00:00:00 EST 2006}
}