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Title: Absolute photoionization cross sections for Xe{sup 4+}, Xe{sup 5+}, and Xe{sup 6+} near 13.5 nm: Experiment and theory

Abstract

Absolute photoionization cross-section measurements for a mixture of ground and metastable states of Xe{sup 4+}, Xe{sup 5+}, and Xe{sup 6+} are reported in the photon energy range of 4d{yields}nf transitions, which occur within or adjacent to the 13.5 nm window for extreme ultraviolet lithography light source development. The reported values allow the quantification of opacity effects in xenon plasmas due to these 4d{yields}nf autoionizing states. The oscillator strengths for the 4d{yields}4f and 4d{yields}5f transitions in Xe{sup q+} (q=1-6) ions are calculated using nonrelativistic Hartree-Fock and random phase approximations. These are compared with published experimental values for Xe{sup +} to Xe{sup 3+} and with the values obtained from the present experimental cross-section measurements for Xe{sup 4+} to Xe{sup 6+}. The calculations assisted in the determination of the metastable content in the ion beams for Xe{sup 5+} and Xe{sup 6+}. The experiments were performed by merging a synchrotron photon beam generated by an undulator beamline of the Advanced Light Source with an ion beam produced by an electron cyclotron resonance ion source.

Authors:
; ; ; ; ; ; ;  [1];  [2];  [3];  [4];  [3]
  1. National Institute of Standards and Technology, Gaithersburg, Maryland 20899-8421 (United States)
  2. (United Kingdom)
  3. (United States)
  4. (Russian Federation)
Publication Date:
OSTI Identifier:
20786923
Resource Type:
Journal Article
Resource Relation:
Journal Name: Physical Review. A; Journal Volume: 73; Journal Issue: 3; Other Information: DOI: 10.1103/PhysRevA.73.032717; (c) 2006 The American Physical Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
74 ATOMIC AND MOLECULAR PHYSICS; ADVANCED LIGHT SOURCE; AUTOIONIZATION; CATIONS; CROSS SECTIONS; ECR ION SOURCES; EXTREME ULTRAVIOLET RADIATION; GROUND STATES; HARTREE-FOCK METHOD; ION BEAMS; METASTABLE STATES; OPACITY; OSCILLATOR STRENGTHS; PHOTOIONIZATION; PHOTON BEAMS; PHOTON-ATOM COLLISIONS; PHOTONS; PLASMA; RANDOM PHASE APPROXIMATION; WIGGLER MAGNETS; XENON IONS

Citation Formats

Aguilar, A., Gillaspy, J. D., Gribakin, G. F., Phaneuf, R. A., Gharaibeh, M. F., Kozlov, M. G., Bozek, J. D., Kilcoyne, A. L. D., Department of Applied Mathematics and Theoretical Physics, Queen's University, Belfast BT7 1NN, Northern Ireland, Department of Physics, MS 220, University of Nevada, Reno, Nevada 89557-0058, Petersburg Nuclear Physics Institute, Gatchina 188300, and Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, California 94720. Absolute photoionization cross sections for Xe{sup 4+}, Xe{sup 5+}, and Xe{sup 6+} near 13.5 nm: Experiment and theory. United States: N. p., 2006. Web. doi:10.1103/PHYSREVA.73.0.
Aguilar, A., Gillaspy, J. D., Gribakin, G. F., Phaneuf, R. A., Gharaibeh, M. F., Kozlov, M. G., Bozek, J. D., Kilcoyne, A. L. D., Department of Applied Mathematics and Theoretical Physics, Queen's University, Belfast BT7 1NN, Northern Ireland, Department of Physics, MS 220, University of Nevada, Reno, Nevada 89557-0058, Petersburg Nuclear Physics Institute, Gatchina 188300, & Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, California 94720. Absolute photoionization cross sections for Xe{sup 4+}, Xe{sup 5+}, and Xe{sup 6+} near 13.5 nm: Experiment and theory. United States. doi:10.1103/PHYSREVA.73.0.
Aguilar, A., Gillaspy, J. D., Gribakin, G. F., Phaneuf, R. A., Gharaibeh, M. F., Kozlov, M. G., Bozek, J. D., Kilcoyne, A. L. D., Department of Applied Mathematics and Theoretical Physics, Queen's University, Belfast BT7 1NN, Northern Ireland, Department of Physics, MS 220, University of Nevada, Reno, Nevada 89557-0058, Petersburg Nuclear Physics Institute, Gatchina 188300, and Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, California 94720. Wed . "Absolute photoionization cross sections for Xe{sup 4+}, Xe{sup 5+}, and Xe{sup 6+} near 13.5 nm: Experiment and theory". United States. doi:10.1103/PHYSREVA.73.0.
@article{osti_20786923,
title = {Absolute photoionization cross sections for Xe{sup 4+}, Xe{sup 5+}, and Xe{sup 6+} near 13.5 nm: Experiment and theory},
author = {Aguilar, A. and Gillaspy, J. D. and Gribakin, G. F. and Phaneuf, R. A. and Gharaibeh, M. F. and Kozlov, M. G. and Bozek, J. D. and Kilcoyne, A. L. D. and Department of Applied Mathematics and Theoretical Physics, Queen's University, Belfast BT7 1NN, Northern Ireland and Department of Physics, MS 220, University of Nevada, Reno, Nevada 89557-0058 and Petersburg Nuclear Physics Institute, Gatchina 188300 and Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, California 94720},
abstractNote = {Absolute photoionization cross-section measurements for a mixture of ground and metastable states of Xe{sup 4+}, Xe{sup 5+}, and Xe{sup 6+} are reported in the photon energy range of 4d{yields}nf transitions, which occur within or adjacent to the 13.5 nm window for extreme ultraviolet lithography light source development. The reported values allow the quantification of opacity effects in xenon plasmas due to these 4d{yields}nf autoionizing states. The oscillator strengths for the 4d{yields}4f and 4d{yields}5f transitions in Xe{sup q+} (q=1-6) ions are calculated using nonrelativistic Hartree-Fock and random phase approximations. These are compared with published experimental values for Xe{sup +} to Xe{sup 3+} and with the values obtained from the present experimental cross-section measurements for Xe{sup 4+} to Xe{sup 6+}. The calculations assisted in the determination of the metastable content in the ion beams for Xe{sup 5+} and Xe{sup 6+}. The experiments were performed by merging a synchrotron photon beam generated by an undulator beamline of the Advanced Light Source with an ion beam produced by an electron cyclotron resonance ion source.},
doi = {10.1103/PHYSREVA.73.0},
journal = {Physical Review. A},
number = 3,
volume = 73,
place = {United States},
year = {Wed Mar 15 00:00:00 EST 2006},
month = {Wed Mar 15 00:00:00 EST 2006}
}