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Title: Absolute photoionization cross sections for Xe{sup 4+}, Xe{sup 5+}, and Xe{sup 6+} near 13.5 nm: Experiment and theory

Abstract

Absolute photoionization cross-section measurements for a mixture of ground and metastable states of Xe{sup 4+}, Xe{sup 5+}, and Xe{sup 6+} are reported in the photon energy range of 4d{yields}nf transitions, which occur within or adjacent to the 13.5 nm window for extreme ultraviolet lithography light source development. The reported values allow the quantification of opacity effects in xenon plasmas due to these 4d{yields}nf autoionizing states. The oscillator strengths for the 4d{yields}4f and 4d{yields}5f transitions in Xe{sup q+} (q=1-6) ions are calculated using nonrelativistic Hartree-Fock and random phase approximations. These are compared with published experimental values for Xe{sup +} to Xe{sup 3+} and with the values obtained from the present experimental cross-section measurements for Xe{sup 4+} to Xe{sup 6+}. The calculations assisted in the determination of the metastable content in the ion beams for Xe{sup 5+} and Xe{sup 6+}. The experiments were performed by merging a synchrotron photon beam generated by an undulator beamline of the Advanced Light Source with an ion beam produced by an electron cyclotron resonance ion source.

Authors:
; ; ; ; ; ; ;  [1];  [2];  [3];  [4];  [3]
  1. National Institute of Standards and Technology, Gaithersburg, Maryland 20899-8421 (United States)
  2. (United Kingdom)
  3. (United States)
  4. (Russian Federation)
Publication Date:
OSTI Identifier:
20786923
Resource Type:
Journal Article
Resource Relation:
Journal Name: Physical Review. A; Journal Volume: 73; Journal Issue: 3; Other Information: DOI: 10.1103/PhysRevA.73.032717; (c) 2006 The American Physical Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
74 ATOMIC AND MOLECULAR PHYSICS; ADVANCED LIGHT SOURCE; AUTOIONIZATION; CATIONS; CROSS SECTIONS; ECR ION SOURCES; EXTREME ULTRAVIOLET RADIATION; GROUND STATES; HARTREE-FOCK METHOD; ION BEAMS; METASTABLE STATES; OPACITY; OSCILLATOR STRENGTHS; PHOTOIONIZATION; PHOTON BEAMS; PHOTON-ATOM COLLISIONS; PHOTONS; PLASMA; RANDOM PHASE APPROXIMATION; WIGGLER MAGNETS; XENON IONS

Citation Formats

Aguilar, A., Gillaspy, J. D., Gribakin, G. F., Phaneuf, R. A., Gharaibeh, M. F., Kozlov, M. G., Bozek, J. D., Kilcoyne, A. L. D., Department of Applied Mathematics and Theoretical Physics, Queen's University, Belfast BT7 1NN, Northern Ireland, Department of Physics, MS 220, University of Nevada, Reno, Nevada 89557-0058, Petersburg Nuclear Physics Institute, Gatchina 188300, and Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, California 94720. Absolute photoionization cross sections for Xe{sup 4+}, Xe{sup 5+}, and Xe{sup 6+} near 13.5 nm: Experiment and theory. United States: N. p., 2006. Web. doi:10.1103/PHYSREVA.73.0.
Aguilar, A., Gillaspy, J. D., Gribakin, G. F., Phaneuf, R. A., Gharaibeh, M. F., Kozlov, M. G., Bozek, J. D., Kilcoyne, A. L. D., Department of Applied Mathematics and Theoretical Physics, Queen's University, Belfast BT7 1NN, Northern Ireland, Department of Physics, MS 220, University of Nevada, Reno, Nevada 89557-0058, Petersburg Nuclear Physics Institute, Gatchina 188300, & Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, California 94720. Absolute photoionization cross sections for Xe{sup 4+}, Xe{sup 5+}, and Xe{sup 6+} near 13.5 nm: Experiment and theory. United States. doi:10.1103/PHYSREVA.73.0.
Aguilar, A., Gillaspy, J. D., Gribakin, G. F., Phaneuf, R. A., Gharaibeh, M. F., Kozlov, M. G., Bozek, J. D., Kilcoyne, A. L. D., Department of Applied Mathematics and Theoretical Physics, Queen's University, Belfast BT7 1NN, Northern Ireland, Department of Physics, MS 220, University of Nevada, Reno, Nevada 89557-0058, Petersburg Nuclear Physics Institute, Gatchina 188300, and Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, California 94720. Wed . "Absolute photoionization cross sections for Xe{sup 4+}, Xe{sup 5+}, and Xe{sup 6+} near 13.5 nm: Experiment and theory". United States. doi:10.1103/PHYSREVA.73.0.
@article{osti_20786923,
title = {Absolute photoionization cross sections for Xe{sup 4+}, Xe{sup 5+}, and Xe{sup 6+} near 13.5 nm: Experiment and theory},
author = {Aguilar, A. and Gillaspy, J. D. and Gribakin, G. F. and Phaneuf, R. A. and Gharaibeh, M. F. and Kozlov, M. G. and Bozek, J. D. and Kilcoyne, A. L. D. and Department of Applied Mathematics and Theoretical Physics, Queen's University, Belfast BT7 1NN, Northern Ireland and Department of Physics, MS 220, University of Nevada, Reno, Nevada 89557-0058 and Petersburg Nuclear Physics Institute, Gatchina 188300 and Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, California 94720},
abstractNote = {Absolute photoionization cross-section measurements for a mixture of ground and metastable states of Xe{sup 4+}, Xe{sup 5+}, and Xe{sup 6+} are reported in the photon energy range of 4d{yields}nf transitions, which occur within or adjacent to the 13.5 nm window for extreme ultraviolet lithography light source development. The reported values allow the quantification of opacity effects in xenon plasmas due to these 4d{yields}nf autoionizing states. The oscillator strengths for the 4d{yields}4f and 4d{yields}5f transitions in Xe{sup q+} (q=1-6) ions are calculated using nonrelativistic Hartree-Fock and random phase approximations. These are compared with published experimental values for Xe{sup +} to Xe{sup 3+} and with the values obtained from the present experimental cross-section measurements for Xe{sup 4+} to Xe{sup 6+}. The calculations assisted in the determination of the metastable content in the ion beams for Xe{sup 5+} and Xe{sup 6+}. The experiments were performed by merging a synchrotron photon beam generated by an undulator beamline of the Advanced Light Source with an ion beam produced by an electron cyclotron resonance ion source.},
doi = {10.1103/PHYSREVA.73.0},
journal = {Physical Review. A},
number = 3,
volume = 73,
place = {United States},
year = {Wed Mar 15 00:00:00 EST 2006},
month = {Wed Mar 15 00:00:00 EST 2006}
}
  • Absolute photoionization cross sections of Xe{sup 3+} to Xe{sup 6+} ions have been measured over an extended photon energy range from the first ionization threshold to 160 eV. Single and double photoionization cross sections have been obtained. In the case of Xe{sup 3+} and Xe{sup 6+} ions, two completely independent setups, both based on the merged beam technique, have been used. Multiconfiguration Dirac-Fock calculations were performed to interpret the spectra in the region of 4d electron excitations. The partition of the oscillator strength between the discrete photoexcitation and the direct photoionization channels in the 4d subshell has allowed us tomore » follow precisely the collapse of the 4f wave function for these ions of the isonuclear series of Xe.« less
  • Using a photoionization depletion method to measure the flux of a metastable atom beam in situ we have determined absolute cross sections for photoionization of the excited rate gas atoms Ar*(4p {sup 3}D3, Kr*(5p {sup 3}D3) and Xe*(6s {sup 3}P0) in a cross beam arrangement. The overlap of the ionizing laser and the atomic beam is taken into account by a method, in which the ionizing laser is scanned across the excited atomic beam.
  • Absolute photoionization cross-section measurements for amixture of ground and metastable states of Xe4+, Xe5+, and Xe6+ arereported in the photon energy range of 4d->nf transitions, which occurwithin or adjacent to the 13.5 nm window for extreme ultravioletlithography light source development. The reported values allow thequantification of opacity effects in xenon plasmas due to these 4d nfautoionizing states. The oscillator strengths for the 4d->4f and4d->5f transitions in Xeq+ (q=1-6) ions are calculated usingnonrelativistic Hartree-Fock and random phase approximations. These arecompared with published experimental values for Xe+ to Xe3+ and with thevalues obtained from the present experimental cross-section measurementsfor Xe4+ to Xe6+.more » The calculations assisted in the determination of themetastable content in the ion beams for Xe5+ and Xe6+. The experimentswere performed by merging a synchrotron photon beam generated by anundulator beamline of the Advanced Light Source with an ion beam producedby an electron cyclotron resonance ion source.« less
  • First measurements of absolute total cross sections for electron-impact excitation of an intercombination transition to a nonradiating state of an ion are reported. The cross sections for near-threshold excitation of the 4[ital s][sup 2] [sup 1][ital S][r arrow]4[ital s]4[ital p] [sup 3][ital P] transition of Kr[sup 6+] are dominated by dielectronic resonances. The measurements can serve as a benchmark for theoretical predictions of dielectronic resonance structure in the excitation of multicharged ions.
  • Quantal calculations are presented for intramultiplet mixing collisions of Ne{sup {asterisk}}(2p{sup 5}3p) with He({sup 1}S{sub 0}) in the 60{endash}1250 meV collision energy range. The coupled equations are solved in a diabatic representation where the coupling terms are obtained using the model potential calculations of Hennecart and Masnou-Seeuws [J. Phys. B {bold 18}, 657 (1985)] for the interaction of the Ne{sup {asterisk}} outer electron with the two cores and values fitted on the spectroscopic data of Dabrowski and Herzberg [Mol. Spectrosc. {bold 73}, 183 (1978)] for the core-core interaction. An extensive comparison with the experimental data of the Eindhoven group ismore » presented for absolute polarized cross sections and anisotropy parameters. Very good agreement is obtained with thermal energy data of Manders {ital et al.} [Phys. Rev. A {bold 39}, 4467 (1989)], while the systematic 30{endash}40{percent} discrepancy with superthermal data of Boom {ital et al.} [Phys. Rev. A {bold 49}, 4660 (1994)] might be attributed to a calibration problem in the experiment rather than to an inaccuracy in the long-range potentials. {copyright} {ital 1997} {ital The American Physical Society}« less