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Title: Diode laser-induced fluorescence measurements of metastable argon ions in a magnetized inductively coupled plasma

Abstract

Velocity distribution functions of metastable argon ions (3d{sup '4}F{sub 7/2}) have been measured to obtain metastable ion density and temperature by the diode laser-induced fluorescence (LIF) technique in magnetized inductively coupled plasma as a function of pressure, rf power, and magnetic field strength. Calculated density from a rate equation agrees with the trends observed in the experimental data. From the calculation, the metastable ion density should be over 10{sup 7} cm{sup -3} to obtain a LIF signal. From a dc bias experiment, it is suggested that the spatial potential can be the dominant ion heating source, and a simple global model for ion temperature is constructed. In this model, approximately 0.01% and 10% of total spatial potential energy can contribute to ion and neutral temperatures, respectively. The measured ion temperature agrees with the calculation.

Authors:
; ;  [1];  [2]
  1. Department of Physics, Korea Advanced Institute of Science and Technology, 373-1, Guseong-dong, Yuseong-gu, Daejeon 305-701 (Korea, Republic of)
  2. (United States)
Publication Date:
OSTI Identifier:
20783071
Resource Type:
Journal Article
Journal Name:
Physics of Plasmas
Additional Journal Information:
Journal Volume: 13; Journal Issue: 5; Other Information: DOI: 10.1063/1.2201894; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1070-664X
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ARGON; ARGON IONS; CHARGED-PARTICLE TRANSPORT; DISTRIBUTION FUNCTIONS; ELECTRON TEMPERATURE; FLUORESCENCE; ION DENSITY; ION TEMPERATURE; LASERS; MAGNETIC FIELDS; METASTABLE STATES; PLASMA; PLASMA DENSITY; PLASMA DIAGNOSTICS; PLASMA HEATING; POTENTIAL ENERGY; POTENTIALS; PRESSURE DEPENDENCE; THERMIONIC DIODES

Citation Formats

Jun, S., Chang, H.Y., McWilliams, R., and Department of Physics and Astronomy, University of California, Irvine, California 92697-4575. Diode laser-induced fluorescence measurements of metastable argon ions in a magnetized inductively coupled plasma. United States: N. p., 2006. Web. doi:10.1063/1.2201894.
Jun, S., Chang, H.Y., McWilliams, R., & Department of Physics and Astronomy, University of California, Irvine, California 92697-4575. Diode laser-induced fluorescence measurements of metastable argon ions in a magnetized inductively coupled plasma. United States. doi:10.1063/1.2201894.
Jun, S., Chang, H.Y., McWilliams, R., and Department of Physics and Astronomy, University of California, Irvine, California 92697-4575. Mon . "Diode laser-induced fluorescence measurements of metastable argon ions in a magnetized inductively coupled plasma". United States. doi:10.1063/1.2201894.
@article{osti_20783071,
title = {Diode laser-induced fluorescence measurements of metastable argon ions in a magnetized inductively coupled plasma},
author = {Jun, S. and Chang, H.Y. and McWilliams, R. and Department of Physics and Astronomy, University of California, Irvine, California 92697-4575},
abstractNote = {Velocity distribution functions of metastable argon ions (3d{sup '4}F{sub 7/2}) have been measured to obtain metastable ion density and temperature by the diode laser-induced fluorescence (LIF) technique in magnetized inductively coupled plasma as a function of pressure, rf power, and magnetic field strength. Calculated density from a rate equation agrees with the trends observed in the experimental data. From the calculation, the metastable ion density should be over 10{sup 7} cm{sup -3} to obtain a LIF signal. From a dc bias experiment, it is suggested that the spatial potential can be the dominant ion heating source, and a simple global model for ion temperature is constructed. In this model, approximately 0.01% and 10% of total spatial potential energy can contribute to ion and neutral temperatures, respectively. The measured ion temperature agrees with the calculation.},
doi = {10.1063/1.2201894},
journal = {Physics of Plasmas},
issn = {1070-664X},
number = 5,
volume = 13,
place = {United States},
year = {2006},
month = {5}
}