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Title: Spin-on-glass coatings for the generation of superpolished substrates for use in the extreme-ultraviolet region

Abstract

Substrates intended for use as extreme-ultraviolet (EUV) optics have extremely stringent requirements in terms of finish. These requirements can dramatically increase the cost and fabrication time, especially when nonconventional shapes, such as toroids, are required. Here we present a spin-on-glass resist process capable of generating superpolished parts from inexpensive substrates. The method has been used to render diamond-turned substrates compatible for use as EUV optics. Toroidal diamond-turned optics with starting rms roughness in the 3.3-3.7 nm range have been smoothed to the 0.4-0.6 nm range. EUV reflectometry characterization of these optics has demonstrated reflectivities of approximately 65%.

Authors:
; ;
Publication Date:
OSTI Identifier:
20779322
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Optics; Journal Volume: 45; Journal Issue: 11; Other Information: DOI: 10.1364/AO.45.002404; (c) 2006 Optical Society of America; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 36 MATERIALS SCIENCE; COATINGS; DIAMONDS; EXTREME ULTRAVIOLET RADIATION; GLASS; OPTICS; REFLECTIVITY; ROUGHNESS; SUBSTRATES

Citation Formats

Salmassi, Farhad, Naulleau, Patrick P., and Gullikson, Eric M. Spin-on-glass coatings for the generation of superpolished substrates for use in the extreme-ultraviolet region. United States: N. p., 2006. Web. doi:10.1364/AO.45.0.
Salmassi, Farhad, Naulleau, Patrick P., & Gullikson, Eric M. Spin-on-glass coatings for the generation of superpolished substrates for use in the extreme-ultraviolet region. United States. doi:10.1364/AO.45.0.
Salmassi, Farhad, Naulleau, Patrick P., and Gullikson, Eric M. Mon . "Spin-on-glass coatings for the generation of superpolished substrates for use in the extreme-ultraviolet region". United States. doi:10.1364/AO.45.0.
@article{osti_20779322,
title = {Spin-on-glass coatings for the generation of superpolished substrates for use in the extreme-ultraviolet region},
author = {Salmassi, Farhad and Naulleau, Patrick P. and Gullikson, Eric M},
abstractNote = {Substrates intended for use as extreme-ultraviolet (EUV) optics have extremely stringent requirements in terms of finish. These requirements can dramatically increase the cost and fabrication time, especially when nonconventional shapes, such as toroids, are required. Here we present a spin-on-glass resist process capable of generating superpolished parts from inexpensive substrates. The method has been used to render diamond-turned substrates compatible for use as EUV optics. Toroidal diamond-turned optics with starting rms roughness in the 3.3-3.7 nm range have been smoothed to the 0.4-0.6 nm range. EUV reflectometry characterization of these optics has demonstrated reflectivities of approximately 65%.},
doi = {10.1364/AO.45.0},
journal = {Applied Optics},
number = 11,
volume = 45,
place = {United States},
year = {Mon Apr 10 00:00:00 EDT 2006},
month = {Mon Apr 10 00:00:00 EDT 2006}
}