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Title: Imaging with a rectangular phase grating applied to displacement metrology

Abstract

We achieved displacement metrology with a high-amplitude signal by using a rectangular phase grating as the pupil in a grating imaging system. The imaging phenomenon with a pupil transmission grating that has a bilevel profile with a 50% duty ratio is discussed on the basis of the optical transfer function. By optimizing the imaging condition, we obtained high-contrast images with high light power under a magnified or demagnified imaging system. The amplitude of the signal in the displacement measurement was four times higher than that of the conventional grating imaging system with amplitude gratings.

Authors:
; ; ;
Publication Date:
OSTI Identifier:
20779278
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Optics; Journal Volume: 45; Journal Issue: 8; Other Information: DOI: 10.1364/AO.45.001713; (c) 2006 Optical Society of America; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; AMPLITUDES; DIFFRACTION GRATINGS; IMAGES; LIGHT TRANSMISSION; SIGNALS; TRANSFER FUNCTIONS; VISIBLE RADIATION

Citation Formats

Ohmura, Yoichi, Oka, Toru, Nakashima, Toshiro, and Hane, Kazuhiro. Imaging with a rectangular phase grating applied to displacement metrology. United States: N. p., 2006. Web. doi:10.1364/AO.45.0.
Ohmura, Yoichi, Oka, Toru, Nakashima, Toshiro, & Hane, Kazuhiro. Imaging with a rectangular phase grating applied to displacement metrology. United States. doi:10.1364/AO.45.0.
Ohmura, Yoichi, Oka, Toru, Nakashima, Toshiro, and Hane, Kazuhiro. Fri . "Imaging with a rectangular phase grating applied to displacement metrology". United States. doi:10.1364/AO.45.0.
@article{osti_20779278,
title = {Imaging with a rectangular phase grating applied to displacement metrology},
author = {Ohmura, Yoichi and Oka, Toru and Nakashima, Toshiro and Hane, Kazuhiro},
abstractNote = {We achieved displacement metrology with a high-amplitude signal by using a rectangular phase grating as the pupil in a grating imaging system. The imaging phenomenon with a pupil transmission grating that has a bilevel profile with a 50% duty ratio is discussed on the basis of the optical transfer function. By optimizing the imaging condition, we obtained high-contrast images with high light power under a magnified or demagnified imaging system. The amplitude of the signal in the displacement measurement was four times higher than that of the conventional grating imaging system with amplitude gratings.},
doi = {10.1364/AO.45.0},
journal = {Applied Optics},
number = 8,
volume = 45,
place = {United States},
year = {Fri Mar 10 00:00:00 EST 2006},
month = {Fri Mar 10 00:00:00 EST 2006}
}
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