Direct force balance method for atomic force microscopy lateral force calibration

Journal Article · Sat Apr 15 00:00:00 EDT 2006 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.2190210· OSTI ID:20779205

Asay, David B; Kim, Seong H ^[1]

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1. Department of Chemical Engineering, Pennsylvania State University, University Park, Pennsylvania 16802 (United States)

A new and simple calibration method for atomic force microscopy (AFM) is developed. This nonscanning method is based on direct force balances on surfaces with known slopes. The lateral force calibration is performed during force-distance measurements for normal force calibration. This method requires a substrate with known slopes, the z motion of the piezocalibrated, and the normal spring constant known. This technique determines not only the lateral detector sensitivity (N/V) but also the detector offset (V/m) and off-centering angle ({alpha}) for asymmetric cantilever-tip geometries. Because it is nonscanning, the AFM cantilever can be calibrated without dulling the tip.

• OSTI ID: 20779205
• Journal Information: Review of Scientific Instruments, Vol. 77, Issue 4; Other Information: DOI: 10.1063/1.2190210; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
ATOMIC FORCE MICROSCOPY
CALIBRATION
DISTANCE
GEOMETRY
SENSITIVITY
SUBSTRATES
SURFACES