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Title: High-temperature stability multilayers for extreme-ultraviolet condenser optics

Abstract

We investigate the thermal stability of Mo/SiC multilayer coatings at elevated temperatures. Transmission electron microscopy and x-ray diffraction studies show that, upon annealing, a thermally induced structural relaxation occurs that transforms the polycrystalline Mo and amorphous SiC layers in as-deposited multilayers into an amorphous Mo-Si-C alloy and crystalline SiC, respectively. After this relaxation process is complete, the multilayer is stable at temperatures up to 400 deg. C.

Authors:
;
Publication Date:
OSTI Identifier:
20779117
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Optics; Journal Volume: 44; Journal Issue: 36; Other Information: DOI: 10.1364/AO.44.007735; (c) 2005 Optical Society of America; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ANNEALING; CARBON ADDITIONS; COATINGS; EXTREME ULTRAVIOLET RADIATION; LAYERS; MIRRORS; MOLYBDENUM; MOLYBDENUM ALLOYS; OPTICAL PROPERTIES; OPTICS; POLYCRYSTALS; SILICON ALLOYS; SILICON CARBIDES; TEMPERATURE RANGE 0400-1000 K; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X-RAY DIFFRACTION

Citation Formats

Bajt, Sasa, and Stearns, Daniel G. High-temperature stability multilayers for extreme-ultraviolet condenser optics. United States: N. p., 2005. Web. doi:10.1364/AO.44.0.
Bajt, Sasa, & Stearns, Daniel G. High-temperature stability multilayers for extreme-ultraviolet condenser optics. United States. doi:10.1364/AO.44.0.
Bajt, Sasa, and Stearns, Daniel G. Tue . "High-temperature stability multilayers for extreme-ultraviolet condenser optics". United States. doi:10.1364/AO.44.0.
@article{osti_20779117,
title = {High-temperature stability multilayers for extreme-ultraviolet condenser optics},
author = {Bajt, Sasa and Stearns, Daniel G},
abstractNote = {We investigate the thermal stability of Mo/SiC multilayer coatings at elevated temperatures. Transmission electron microscopy and x-ray diffraction studies show that, upon annealing, a thermally induced structural relaxation occurs that transforms the polycrystalline Mo and amorphous SiC layers in as-deposited multilayers into an amorphous Mo-Si-C alloy and crystalline SiC, respectively. After this relaxation process is complete, the multilayer is stable at temperatures up to 400 deg. C.},
doi = {10.1364/AO.44.0},
journal = {Applied Optics},
number = 36,
volume = 44,
place = {United States},
year = {Tue Dec 20 00:00:00 EST 2005},
month = {Tue Dec 20 00:00:00 EST 2005}
}