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Title: Decaborane beam from ITEP Bernas ion source

Abstract

A joint research and development program is under way to develop steady-state intense ion sources for the two energy extremes of MeV and hundreds of eV. The difficulties of extraction and transportation of low-energy boron beams are investigated using a decaborane compound [I. Yamada, W. L. Brown, J. A. Northby, and M. Sosnowski, Nucl. Instrum. Methods Phys. Res. B 79, 223 (1993)]. Presented here are the results from ITEP experiments using the Bernas ion source with an indirectly heated LaB{sub 6} cathode.

Authors:
; ; ; ; ; ; ; ; ; ; ; ; ; ;  [1];  [2];  [3];  [2];  [3]
  1. Institute for Theoretical and Experimental Physics, Moscow 117218 (Russian Federation)
  2. (United States)
  3. (Russian Federation)
Publication Date:
OSTI Identifier:
20779095
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 77; Journal Issue: 3; Conference: 11. international conference on ion sources, Caen (France), 12-16 Sep 2005; Other Information: DOI: 10.1063/1.2147737; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS; BEAM EXTRACTION; BORON IONS; CATHODES; EV RANGE; ION BEAMS; ION SOURCES; LANTHANUM BORIDES; MEV RANGE; STEADY-STATE CONDITIONS

Citation Formats

Kulevoy, T.V., Petrenko, S.V., Kuibeda, R.P., Batalin, V.A., Pershin, V.I., Koslov, A.V., Stasevich, Yu.B., Hershcovitch, A., Johnson, B.M., Oks, E.M., Gushenets, V.I., Poole, H.J., Storozhenko, P.A., Gurkova, E.L., Alexeyenko, O.V., Brookhaven National Laboratory, Upton, New York 11973, High Current Electronics Institute Russian Academy of Sciences, Tomsk 634055, PVI, Oxnard, California 93031-5023, and State Research Institute for Chemistry and Technology of Organoelements Compounds, Shosse Entuziastov 38, Moscow 111123. Decaborane beam from ITEP Bernas ion source. United States: N. p., 2006. Web. doi:10.1063/1.2147737.
Kulevoy, T.V., Petrenko, S.V., Kuibeda, R.P., Batalin, V.A., Pershin, V.I., Koslov, A.V., Stasevich, Yu.B., Hershcovitch, A., Johnson, B.M., Oks, E.M., Gushenets, V.I., Poole, H.J., Storozhenko, P.A., Gurkova, E.L., Alexeyenko, O.V., Brookhaven National Laboratory, Upton, New York 11973, High Current Electronics Institute Russian Academy of Sciences, Tomsk 634055, PVI, Oxnard, California 93031-5023, & State Research Institute for Chemistry and Technology of Organoelements Compounds, Shosse Entuziastov 38, Moscow 111123. Decaborane beam from ITEP Bernas ion source. United States. doi:10.1063/1.2147737.
Kulevoy, T.V., Petrenko, S.V., Kuibeda, R.P., Batalin, V.A., Pershin, V.I., Koslov, A.V., Stasevich, Yu.B., Hershcovitch, A., Johnson, B.M., Oks, E.M., Gushenets, V.I., Poole, H.J., Storozhenko, P.A., Gurkova, E.L., Alexeyenko, O.V., Brookhaven National Laboratory, Upton, New York 11973, High Current Electronics Institute Russian Academy of Sciences, Tomsk 634055, PVI, Oxnard, California 93031-5023, and State Research Institute for Chemistry and Technology of Organoelements Compounds, Shosse Entuziastov 38, Moscow 111123. Wed . "Decaborane beam from ITEP Bernas ion source". United States. doi:10.1063/1.2147737.
@article{osti_20779095,
title = {Decaborane beam from ITEP Bernas ion source},
author = {Kulevoy, T.V. and Petrenko, S.V. and Kuibeda, R.P. and Batalin, V.A. and Pershin, V.I. and Koslov, A.V. and Stasevich, Yu.B. and Hershcovitch, A. and Johnson, B.M. and Oks, E.M. and Gushenets, V.I. and Poole, H.J. and Storozhenko, P.A. and Gurkova, E.L. and Alexeyenko, O.V. and Brookhaven National Laboratory, Upton, New York 11973 and High Current Electronics Institute Russian Academy of Sciences, Tomsk 634055 and PVI, Oxnard, California 93031-5023 and State Research Institute for Chemistry and Technology of Organoelements Compounds, Shosse Entuziastov 38, Moscow 111123},
abstractNote = {A joint research and development program is under way to develop steady-state intense ion sources for the two energy extremes of MeV and hundreds of eV. The difficulties of extraction and transportation of low-energy boron beams are investigated using a decaborane compound [I. Yamada, W. L. Brown, J. A. Northby, and M. Sosnowski, Nucl. Instrum. Methods Phys. Res. B 79, 223 (1993)]. Presented here are the results from ITEP experiments using the Bernas ion source with an indirectly heated LaB{sub 6} cathode.},
doi = {10.1063/1.2147737},
journal = {Review of Scientific Instruments},
number = 3,
volume = 77,
place = {United States},
year = {Wed Mar 15 00:00:00 EST 2006},
month = {Wed Mar 15 00:00:00 EST 2006}
}
  • A joint research and development effort focusing on the design of steady state, intense ion sources has been in progress for the past two and a half years with a couple of Russian institutions. The ultimate goal of the effort is to meet the two, energy extreme range needs of mega-electron-volt and 100's of electron-volt ion implanters. This endeavor has already resulted in record steady state output currents of higher charge state antimony and phosphorous ions to meet high-energy implantation requirements. For low energy ion implantation, R and D efforts have involved molecular ions and a novel plasmaless/gasless deceleration method.more » To date, 1 emA of positive decaborane ions were extracted at 10 keV and a smaller current of negative decaborane ions were also extracted. Though of scientific interest, negative decaborane ions did not attract interest from industry, since the semiconductor ion implant industry seems to have solved the wafer-charging problem. This paper describes conditions under which negative decaborane ions are formed and extracted from a Bernas ion source.« less
  • A joint research and development of steady state intense boron ion sources for hundreds of electron-volt ion implanters has been in progress for the past 5 years. The difficulties of extraction and transportation of low energy boron beams can be solved by implanting clusters of boron atoms. In Institute for Theoretical and Experimental Physics (ITEP) the Bernas ion source successfully generated the beam of decaborane ions. The carborane (C{sub 2}B{sub 10}H{sub 12}) ion beam is more attractive material due to its better thermal stability. The results of carborane ion beam generation are presented. The result of the beam implantation intomore » the silicon wafer is presented as well.« less
  • A joint research and development program is underway to develop steady-state intense ion sources for the two energy extremes of MeV and hundreds of eV. For the MeV range the investigations were focused on charge-state enhancement for ions generated by the modified Bernas ion sources. Based on the previously successful ITEP experience with the e-metal vapor vacuum arc ion source [e.g., Batalin et al., Rev. Sci. Instrum. 75, 1900 (2004)], the injection of a high-energy electron beam into the Bernas ion source discharge region is expected to enhance the production of high charge states. Presented here are construction details andmore » studies of electron-beam influence on the enhancement of ion-beam charge states generated by the modified Bernas ion source.« less
  • A joint research and development program is underway to investigate beam transport systems for intense steady-state ion sources for ion implanters. Two energy extremes of MeV and hundreds of eV are investigated using a modified Bernas ion source with an indirectly heated cathode. Results are presented for simulations of electrostatic systems performed to investigate the transportation of ion beams over a wide mass range: boron to decaborane.
  • The experiment automation system is supposed to be developed for experimental facility for material science at ITEP, based on a Bernas ion source. The program CAMFT is assumed to be involved into the program of the experiment automation. CAMFT is developed to simulate the intense charged particle bunch motion in the external magnetic fields with arbitrary geometry by means of the accurate solution of the particle motion equation. Program allows the consideration of the bunch intensity up to 10{sup 10} ppb. Preliminary calculations are performed at ITEP supercomputer. The results of the simulation of the beam pre-acceleration and following turnmore » in magnetic field are presented for different initial conditions.« less