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Title: Design of the channel for irradiation of materials with highly charged ion beams obtained from the mVINIS ion source

Abstract

The low-energy part of the TESLA Accelerator Installation comprises an electron cyclotron resonance ion source (the mVINIS ion source) and the channel for modification of materials (L3A). The L3A channel is long and has low beam transmission (30%-50%), so it is not suitable for high fluence implantations (over 10{sup 16} cm{sup -2}). Therefore, we are planning to introduce an experimental channel (L4), close to the mVINIS Ion Source, where we shall be able to achieve high beam currents on the target and, consequently, irradiation of materials to high fluences. During the ion implantation, we shall be able to measure fluence rate, achieve uniform fluence distribution by a mechanism for x and y sample movements, and control the sample temperature in the range of 0-200 deg. C.

Authors:
; ; ; ;  [1]
  1. Laboratory of Physics (010), Vinca Institute of Nuclear Sciences, P.O. Box 522, 11001 Belgrade (Serbia and Montenegro)
Publication Date:
OSTI Identifier:
20778953
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 77; Journal Issue: 3; Conference: 11. international conference on ion sources, Caen (France), 12-16 Sep 2005; Other Information: DOI: 10.1063/1.2163331; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS; BEAM CURRENTS; DESIGN; ECR ION SOURCES; ION BEAMS; ION IMPLANTATION; IRRADIATION

Citation Formats

Siljegovic, M., Dobrosavljevic, A., Draganic, I., Cizmic, B., and Jelic, G. Design of the channel for irradiation of materials with highly charged ion beams obtained from the mVINIS ion source. United States: N. p., 2006. Web. doi:10.1063/1.2163331.
Siljegovic, M., Dobrosavljevic, A., Draganic, I., Cizmic, B., & Jelic, G. Design of the channel for irradiation of materials with highly charged ion beams obtained from the mVINIS ion source. United States. doi:10.1063/1.2163331.
Siljegovic, M., Dobrosavljevic, A., Draganic, I., Cizmic, B., and Jelic, G. Wed . "Design of the channel for irradiation of materials with highly charged ion beams obtained from the mVINIS ion source". United States. doi:10.1063/1.2163331.
@article{osti_20778953,
title = {Design of the channel for irradiation of materials with highly charged ion beams obtained from the mVINIS ion source},
author = {Siljegovic, M. and Dobrosavljevic, A. and Draganic, I. and Cizmic, B. and Jelic, G.},
abstractNote = {The low-energy part of the TESLA Accelerator Installation comprises an electron cyclotron resonance ion source (the mVINIS ion source) and the channel for modification of materials (L3A). The L3A channel is long and has low beam transmission (30%-50%), so it is not suitable for high fluence implantations (over 10{sup 16} cm{sup -2}). Therefore, we are planning to introduce an experimental channel (L4), close to the mVINIS Ion Source, where we shall be able to achieve high beam currents on the target and, consequently, irradiation of materials to high fluences. During the ion implantation, we shall be able to measure fluence rate, achieve uniform fluence distribution by a mechanism for x and y sample movements, and control the sample temperature in the range of 0-200 deg. C.},
doi = {10.1063/1.2163331},
journal = {Review of Scientific Instruments},
number = 3,
volume = 77,
place = {United States},
year = {Wed Mar 15 00:00:00 EST 2006},
month = {Wed Mar 15 00:00:00 EST 2006}
}