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Title: Design of the channel for irradiation of materials with highly charged ion beams obtained from the mVINIS ion source

Abstract

The low-energy part of the TESLA Accelerator Installation comprises an electron cyclotron resonance ion source (the mVINIS ion source) and the channel for modification of materials (L3A). The L3A channel is long and has low beam transmission (30%-50%), so it is not suitable for high fluence implantations (over 10{sup 16} cm{sup -2}). Therefore, we are planning to introduce an experimental channel (L4), close to the mVINIS Ion Source, where we shall be able to achieve high beam currents on the target and, consequently, irradiation of materials to high fluences. During the ion implantation, we shall be able to measure fluence rate, achieve uniform fluence distribution by a mechanism for x and y sample movements, and control the sample temperature in the range of 0-200 deg. C.

Authors:
; ; ; ;  [1]
  1. Laboratory of Physics (010), Vinca Institute of Nuclear Sciences, P.O. Box 522, 11001 Belgrade (Serbia and Montenegro)
Publication Date:
OSTI Identifier:
20778953
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 77; Journal Issue: 3; Conference: 11. international conference on ion sources, Caen (France), 12-16 Sep 2005; Other Information: DOI: 10.1063/1.2163331; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS; BEAM CURRENTS; DESIGN; ECR ION SOURCES; ION BEAMS; ION IMPLANTATION; IRRADIATION

Citation Formats

Siljegovic, M., Dobrosavljevic, A., Draganic, I., Cizmic, B., and Jelic, G. Design of the channel for irradiation of materials with highly charged ion beams obtained from the mVINIS ion source. United States: N. p., 2006. Web. doi:10.1063/1.2163331.
Siljegovic, M., Dobrosavljevic, A., Draganic, I., Cizmic, B., & Jelic, G. Design of the channel for irradiation of materials with highly charged ion beams obtained from the mVINIS ion source. United States. doi:10.1063/1.2163331.
Siljegovic, M., Dobrosavljevic, A., Draganic, I., Cizmic, B., and Jelic, G. Wed . "Design of the channel for irradiation of materials with highly charged ion beams obtained from the mVINIS ion source". United States. doi:10.1063/1.2163331.
@article{osti_20778953,
title = {Design of the channel for irradiation of materials with highly charged ion beams obtained from the mVINIS ion source},
author = {Siljegovic, M. and Dobrosavljevic, A. and Draganic, I. and Cizmic, B. and Jelic, G.},
abstractNote = {The low-energy part of the TESLA Accelerator Installation comprises an electron cyclotron resonance ion source (the mVINIS ion source) and the channel for modification of materials (L3A). The L3A channel is long and has low beam transmission (30%-50%), so it is not suitable for high fluence implantations (over 10{sup 16} cm{sup -2}). Therefore, we are planning to introduce an experimental channel (L4), close to the mVINIS Ion Source, where we shall be able to achieve high beam currents on the target and, consequently, irradiation of materials to high fluences. During the ion implantation, we shall be able to measure fluence rate, achieve uniform fluence distribution by a mechanism for x and y sample movements, and control the sample temperature in the range of 0-200 deg. C.},
doi = {10.1063/1.2163331},
journal = {Review of Scientific Instruments},
number = 3,
volume = 77,
place = {United States},
year = {Wed Mar 15 00:00:00 EST 2006},
month = {Wed Mar 15 00:00:00 EST 2006}
}
  • High yields of highly charged ions are produced with electron beam ion sources (EBISs) operated in a batch or pulsed mode, yielding small duty cycles. An EBIS operated in a continuous, dc, or leaky mode can produce continuous, {open_quote}{open_quote}dc{close_quote}{close_quote} ion beams, although with substantially lower yields especially for the higher charge states. This article introduces the leaky batch mode and the dc batch mode of operation which combine the high duty cycles obtained with leaky or dc modes with the high yields of highly charged ions obtained with batch modes. The leaky batch mode produces ion beams with duty cyclesmore » as high as 90{percent} with ion yields as high as 70{percent} of the most efficient batch mode. The dc batch mode delivers constant intensity (dc) ion beams during 50{percent} of the time with ion yields as high as 98{percent} of the most efficient batch mode. When the dc batch mode is combined with the stretcher mode proposed by Becker, the dc batch mode will allow for dc ion beams of constant intensity with yields close to the most efficient batch mode. {copyright} {ital 1996 American Institute of Physics.}« less
  • Electron beam ion sources produce very highly charged ions most efficiently in a batch mode as the confinement time can be directly optimized for the production of the desired charge state. If, after confinement, the voltage of the ion-confining downstream dam is lowered rapidly, all ions escape and form an ion beam pulse with a length of a few tens of {mu}s. Raising the main trap voltage while maintaining a constant dam voltage in a {open_quotes}spill-over expulsion{close_quotes} reduces the energy spread of the expelled ions. The longer time periods of {open_quotes}slow-,{close_quotes} {open_quotes}leaky batch mode-,{close_quotes} and {open_quotes}direct current (dc) batch mode-{close_quotes}more » expulsions allow for increasing the ion beam duty cycle. Combining the rapid expulsion with one of the latter methods allows for the expulsion of the ions of a single batch in many small microbunches with variable intervals, maintaining the low energy spread and the increased duty cycle of slow expulsions. Combining the {open_quotes}microbunching{close_quotes} with {open_quotes}dc batch mode production{close_quotes} and a multitrap operation will eventually allow for the production of equally intense ion bunches over a wide range of frequencies without any deadtime, and with minimal compromise on the most efficient production parameters. {copyright} {ital 1998 American Institute of Physics.}« less
  • A Wien filter was designed for and tested with a room temperature electron beam ion source (EBIS). Xenon charge state spectra up to the charge state Xe{sup 46+} were resolved as well as the isotopes of krypton using apertures of different sizes. The complete setup consisting of an EBIS and a Wien filter has a length of less than 1 m substituting a complete classical beamline setup. The Wien filter is equipped with removable permanent magnets. Hence total beam current measurements are possible via simple removal of the permanent magnets. In dependence on the needs of resolution a weak (0.2more » T) or a strong (0.5 T) magnets setup can be used. In this paper the principle of operation and the design of the Wien filter meeting the requirements of an EBIS are briefly discussed. The first ion beam extraction and separation experiments with a Dresden EBIS are presented.« less
  • Electron cyclotron resonance ion source (ECRIS) development has progressed with multiple-frequency plasma heating, higher mirror magnetic fields, and better technique to provide extra cold electrons. Such techniques greatly enhance the production of highly charged ions from ECRISs. So far at continuous wave (CW) mode operation, up to 300 e{mu}A of O{sup 7+} and 1.15 emA of O{sup 6+}, more than 100 e{mu}A of intermediate heavy ions for charge states up to Ar{sup 13+}, Ca{sup 13+}, Fe{sup 13+}, Co{sup 14+}, and Kr{sup 18+}, and tens of e{mu}A of heavy ions with charge states to Kr{sup 26+}, Xe{sup 28+}, Au{sup 35+}, Bi{supmore » 34+}, and U{sup 34+} were produced from ECRISs. At an intensity of at least 1 e{mu}A, the maximum charge state available for the heavy ions are Xe{sup 36+}, Au{sup 46+}, Bi{sup 47+}, and U{sup 48+}. An order of magnitude enhancement for fully stripped argon ions (I{ge}60enA) were also achieved. This article will review the ECR ion source progress and discuss key requirement for ECRISs to produce the highly charged ion beams. {copyright} {ital 1998 American Institute of Physics.}« less
  • The mVINIS ion source has enabled us to obtain multiply charged ion beams from gases as well as from solid materials. The solid substance ion beams were produced by using two techniques: (a) the evaporation of metals by using the inlet system based on a minioven and (b) the metal-ions-from-volatile-compounds method (MIVOC) by using the modified gas inlet system. Great efforts were made in the production of high current stable ion beams of solids with relatively high melting points (over 1000 deg. C). The B{sup 3+} ion-beam current of over 300 {mu}A was one of the most intensive beams extractedmore » until now. The obtained multiply charged ion-beam spectra of solid substances (B, Fe, and Zn) are presented as well as some of the corresponding experimental results achieved during the modification of polymers, carbon materials, and fullerenes.« less