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Title: Analysis and performance of a parallel axis flatness measuring instrument

Abstract

This article describes the design, analysis, and performance of a flatness inspection instrument to measure workpieces with up to 1 mm departure from flatness. The instrument uses two air bearing spindles arranged with parallel axes to simultaneously rotate a workpiece and slowly pass a capacitance probe over the spinning surface. Capacitance probes offer user-selectable sensitivity to provide multiple combinations of measurement range and resolution. In tests with a high sensitivity probe, the instrument demonstrated measurement repeatability of 25 nm on a null-set 75 mm workpiece. This article presents a complete homogeneous transformation matrix analysis of the propagation of errors into the measurement as well as sample measurements on diamond turned workpieces.

Authors:
; ; ;  [1];  [2];  [2]
  1. Pennsylvania State University, 21 Reber Building, University Park, Pennsylvania 16802 (United States)
  2. (United States)
Publication Date:
OSTI Identifier:
20778745
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 77; Journal Issue: 2; Other Information: DOI: 10.1063/1.2173073; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; AIR; CAPACITANCE; DESIGN; DIAMONDS; INSPECTION; MEASURING INSTRUMENTS; PERFORMANCE; PROBES; SENSITIVITY; SURFACES

Citation Formats

Marsh, Eric, Schalcosky, David, Couey, Jeremiah, Vallance, Ryan, Kulicke and Soffa, 2101 Blair Mill Road, Willow Grove, Pennsylvania 19090, and George Washington University, 738 Phillips Hall, 801 22nd Street N.W., Washington, DC 20052. Analysis and performance of a parallel axis flatness measuring instrument. United States: N. p., 2006. Web. doi:10.1063/1.2173073.
Marsh, Eric, Schalcosky, David, Couey, Jeremiah, Vallance, Ryan, Kulicke and Soffa, 2101 Blair Mill Road, Willow Grove, Pennsylvania 19090, & George Washington University, 738 Phillips Hall, 801 22nd Street N.W., Washington, DC 20052. Analysis and performance of a parallel axis flatness measuring instrument. United States. doi:10.1063/1.2173073.
Marsh, Eric, Schalcosky, David, Couey, Jeremiah, Vallance, Ryan, Kulicke and Soffa, 2101 Blair Mill Road, Willow Grove, Pennsylvania 19090, and George Washington University, 738 Phillips Hall, 801 22nd Street N.W., Washington, DC 20052. Wed . "Analysis and performance of a parallel axis flatness measuring instrument". United States. doi:10.1063/1.2173073.
@article{osti_20778745,
title = {Analysis and performance of a parallel axis flatness measuring instrument},
author = {Marsh, Eric and Schalcosky, David and Couey, Jeremiah and Vallance, Ryan and Kulicke and Soffa, 2101 Blair Mill Road, Willow Grove, Pennsylvania 19090 and George Washington University, 738 Phillips Hall, 801 22nd Street N.W., Washington, DC 20052},
abstractNote = {This article describes the design, analysis, and performance of a flatness inspection instrument to measure workpieces with up to 1 mm departure from flatness. The instrument uses two air bearing spindles arranged with parallel axes to simultaneously rotate a workpiece and slowly pass a capacitance probe over the spinning surface. Capacitance probes offer user-selectable sensitivity to provide multiple combinations of measurement range and resolution. In tests with a high sensitivity probe, the instrument demonstrated measurement repeatability of 25 nm on a null-set 75 mm workpiece. This article presents a complete homogeneous transformation matrix analysis of the propagation of errors into the measurement as well as sample measurements on diamond turned workpieces.},
doi = {10.1063/1.2173073},
journal = {Review of Scientific Instruments},
number = 2,
volume = 77,
place = {United States},
year = {Wed Feb 15 00:00:00 EST 2006},
month = {Wed Feb 15 00:00:00 EST 2006}
}
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