Silicon nanomechanical resonators with a double-triangle cross section leading to an enhanced mass sensitivity

Journal Article · Mon Feb 06 00:00:00 EST 2006 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.2172236· OSTI ID:20778682

Vlaminck, I de; Greve, K de; Lagae, L; Borghs, G ^[1]

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1. Imec, Kapeldreef 75, B-3001 Leuven (Belgium)

We report on a silicon nanomechanical resonator fabricated with a double-triangle cross section, leading to an enhanced mass sensing capabilities. We analytically derive the dependence of the mass detection limit on, respectively, the moment of inertia and the cross section of a beam resonator. We conclude that our scaling compatible fabrication scheme can yield an enhancement of as much as 2.3 with regard to regular, rectangular resonators of the same size. We experimentally confirm the shape dependence of the resonant frequency and maximum drive energy, supporting our model for the mass detection limit.

• OSTI ID: 20778682
• Journal Information: Applied Physics Letters, Vol. 88, Issue 6; Other Information: DOI: 10.1063/1.2172236; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
CROSS SECTIONS
FABRICATION
MASS
MOMENT OF INERTIA
NANOSTRUCTURES
RESONATORS
SEMICONDUCTOR MATERIALS
SILICON