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Title: Fabrication and electromechanical properties of a self-actuating Pb(Zr{sub 0.52}Ti{sub 0.48})O{sub 3} microcantilever using a direct patternable sol-gel method

Abstract

The use of direct-patternable lead zirconate titanate (PZT) films produced using photosensitive stock solutions with ortho-nitrobenzaldehyde and UV (365 nm) irradiation has reached an advanced stage of application in microdetection systems. Electromechanical properties of direct patterned PZT microcantilevers on SiN{sub x}/Ta/Pt/PZT/Pt/SiO{sub 2} structure were measured by a laser vibrometer system as a function of cantilever length. The gravimetric sensitivity of cantilevers in air was characterized by Au deposition, and the mass detecting resolution was 38 Hz/ng. These results suggested a possibility that microelectromechanical systems may be fabricated relatively easily and without high cost processes, for example, by PZT dry etching.

Authors:
; ; ;  [1];  [2]
  1. Department of Ceramic Engineering, Yonsei University, 134, Shinchon-dong, Seodaemoon-ku, Seoul 120-749 (Korea, Republic of)
  2. (Korea, Republic of)
Publication Date:
OSTI Identifier:
20778579
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 88; Journal Issue: 4; Other Information: DOI: 10.1063/1.2168261; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 36 MATERIALS SCIENCE; AIR; DEPOSITION; ETCHING; FABRICATION; FERROELECTRIC MATERIALS; GRAVIMETRIC ANALYSIS; PLATINUM; PZT; SENSITIVITY; SILICON NITRIDES; SILICON OXIDES; SOL-GEL PROCESS; SOLUTIONS; TANTALUM; THIN FILMS; ULTRAVIOLET RADIATION

Citation Formats

Kang, Ghi Yuun, Bae, Sang-Woo, Park, Hyung-Ho, Kim, Tae Song, and Microsystem Research Center, KIST, Seoul 136-791. Fabrication and electromechanical properties of a self-actuating Pb(Zr{sub 0.52}Ti{sub 0.48})O{sub 3} microcantilever using a direct patternable sol-gel method. United States: N. p., 2006. Web. doi:10.1063/1.2168261.
Kang, Ghi Yuun, Bae, Sang-Woo, Park, Hyung-Ho, Kim, Tae Song, & Microsystem Research Center, KIST, Seoul 136-791. Fabrication and electromechanical properties of a self-actuating Pb(Zr{sub 0.52}Ti{sub 0.48})O{sub 3} microcantilever using a direct patternable sol-gel method. United States. doi:10.1063/1.2168261.
Kang, Ghi Yuun, Bae, Sang-Woo, Park, Hyung-Ho, Kim, Tae Song, and Microsystem Research Center, KIST, Seoul 136-791. Mon . "Fabrication and electromechanical properties of a self-actuating Pb(Zr{sub 0.52}Ti{sub 0.48})O{sub 3} microcantilever using a direct patternable sol-gel method". United States. doi:10.1063/1.2168261.
@article{osti_20778579,
title = {Fabrication and electromechanical properties of a self-actuating Pb(Zr{sub 0.52}Ti{sub 0.48})O{sub 3} microcantilever using a direct patternable sol-gel method},
author = {Kang, Ghi Yuun and Bae, Sang-Woo and Park, Hyung-Ho and Kim, Tae Song and Microsystem Research Center, KIST, Seoul 136-791},
abstractNote = {The use of direct-patternable lead zirconate titanate (PZT) films produced using photosensitive stock solutions with ortho-nitrobenzaldehyde and UV (365 nm) irradiation has reached an advanced stage of application in microdetection systems. Electromechanical properties of direct patterned PZT microcantilevers on SiN{sub x}/Ta/Pt/PZT/Pt/SiO{sub 2} structure were measured by a laser vibrometer system as a function of cantilever length. The gravimetric sensitivity of cantilevers in air was characterized by Au deposition, and the mass detecting resolution was 38 Hz/ng. These results suggested a possibility that microelectromechanical systems may be fabricated relatively easily and without high cost processes, for example, by PZT dry etching.},
doi = {10.1063/1.2168261},
journal = {Applied Physics Letters},
number = 4,
volume = 88,
place = {United States},
year = {Mon Jan 23 00:00:00 EST 2006},
month = {Mon Jan 23 00:00:00 EST 2006}
}