Development of liquid-metal-ion source low-energy ion gun/high-temperature ultrahigh vacuum scanning tunneling microscope combined system

Journal Article · Thu Dec 15 00:00:00 EST 2005 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.2149001· OSTI ID:20778499

Uchigasaki, M; Kamioka, T; Hirata, T; Shimizu, T; Lin, F; Shinada, T; Ohdomari, I ^[1]

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1. Faculty of Science and Engineering, Waseda University, 3-4-1 Ohkubo, Shinjuku-ku, Tokyo 169-8555 (Japan)

A liquid-metal-ion source low-energy ion gun/high-temperature ultrahigh vacuum scanning tunneling microscope combined system (LMIS-IG/STM) has been developed in order to investigate the ion beam modification process in situ based on our previous ion gun/STM combined system (IG/STM). Various kinds of metal ions can be irradiated with low acceleration energy of 0.01-5 keV during STM observation at 400-600 deg. C. As an example, real-time STM observation of Si(111)7x7 surface irradiated with Si{sup 2+} ions is demonstrated. The STM results have shown that the surface defects generated by Si{sup 2+} ion irradiation exhibit similar behavior of surface defects induced by Ar{sup +} irradiation with IG/STM.

• OSTI ID: 20778499
• Journal Information: Review of Scientific Instruments, Vol. 76, Issue 12; Other Information: DOI: 10.1063/1.2149001; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ARGON IONS
ION BEAMS
ION SOURCES
IRRADIATION
LIQUID METALS
SCANNING TUNNELING MICROSCOPY
SILICON
SILICON IONS
SURFACES
TEMPERATURE RANGE 0400-1000 K