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Title: Development of liquid-metal-ion source low-energy ion gun/high-temperature ultrahigh vacuum scanning tunneling microscope combined system

Abstract

A liquid-metal-ion source low-energy ion gun/high-temperature ultrahigh vacuum scanning tunneling microscope combined system (LMIS-IG/STM) has been developed in order to investigate the ion beam modification process in situ based on our previous ion gun/STM combined system (IG/STM). Various kinds of metal ions can be irradiated with low acceleration energy of 0.01-5 keV during STM observation at 400-600 deg. C. As an example, real-time STM observation of Si(111)7x7 surface irradiated with Si{sup 2+} ions is demonstrated. The STM results have shown that the surface defects generated by Si{sup 2+} ion irradiation exhibit similar behavior of surface defects induced by Ar{sup +} irradiation with IG/STM.

Authors:
; ; ; ; ; ;  [1];  [2];  [3]
  1. Faculty of Science and Engineering, Waseda University, 3-4-1 Ohkubo, Shinjuku-ku, Tokyo 169-8555 (Japan)
  2. (ASMeW), 513 Wasedatsurumaki-cho, Shinjuku-ku, Tokyo 162-0041 (Japan)
  3. (Japan) and Kagami Memorial Laboratory for Materials Science and Technology, Waseda University, 2-8-26 Nishiwaseda, Shinjuku-ku, Tokyo 169-0051 (Japan)
Publication Date:
OSTI Identifier:
20778499
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 76; Journal Issue: 12; Other Information: DOI: 10.1063/1.2149001; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ARGON IONS; ION BEAMS; ION SOURCES; IRRADIATION; LIQUID METALS; SCANNING TUNNELING MICROSCOPY; SILICON; SILICON IONS; SURFACES; TEMPERATURE RANGE 0400-1000 K

Citation Formats

Uchigasaki, M., Kamioka, T., Hirata, T., Shimizu, T., Lin, F., Shinada, T., Ohdomari, I., Consolidated Research Institute for Advanced Science and Medical Care, and Faculty of Science and Engineering, Waseda University, 3-4-1 Ohkubo, Shinjuku-ku, Tokyo 169-8555. Development of liquid-metal-ion source low-energy ion gun/high-temperature ultrahigh vacuum scanning tunneling microscope combined system. United States: N. p., 2005. Web. doi:10.1063/1.2149001.
Uchigasaki, M., Kamioka, T., Hirata, T., Shimizu, T., Lin, F., Shinada, T., Ohdomari, I., Consolidated Research Institute for Advanced Science and Medical Care, & Faculty of Science and Engineering, Waseda University, 3-4-1 Ohkubo, Shinjuku-ku, Tokyo 169-8555. Development of liquid-metal-ion source low-energy ion gun/high-temperature ultrahigh vacuum scanning tunneling microscope combined system. United States. doi:10.1063/1.2149001.
Uchigasaki, M., Kamioka, T., Hirata, T., Shimizu, T., Lin, F., Shinada, T., Ohdomari, I., Consolidated Research Institute for Advanced Science and Medical Care, and Faculty of Science and Engineering, Waseda University, 3-4-1 Ohkubo, Shinjuku-ku, Tokyo 169-8555. Thu . "Development of liquid-metal-ion source low-energy ion gun/high-temperature ultrahigh vacuum scanning tunneling microscope combined system". United States. doi:10.1063/1.2149001.
@article{osti_20778499,
title = {Development of liquid-metal-ion source low-energy ion gun/high-temperature ultrahigh vacuum scanning tunneling microscope combined system},
author = {Uchigasaki, M. and Kamioka, T. and Hirata, T. and Shimizu, T. and Lin, F. and Shinada, T. and Ohdomari, I. and Consolidated Research Institute for Advanced Science and Medical Care and Faculty of Science and Engineering, Waseda University, 3-4-1 Ohkubo, Shinjuku-ku, Tokyo 169-8555},
abstractNote = {A liquid-metal-ion source low-energy ion gun/high-temperature ultrahigh vacuum scanning tunneling microscope combined system (LMIS-IG/STM) has been developed in order to investigate the ion beam modification process in situ based on our previous ion gun/STM combined system (IG/STM). Various kinds of metal ions can be irradiated with low acceleration energy of 0.01-5 keV during STM observation at 400-600 deg. C. As an example, real-time STM observation of Si(111)7x7 surface irradiated with Si{sup 2+} ions is demonstrated. The STM results have shown that the surface defects generated by Si{sup 2+} ion irradiation exhibit similar behavior of surface defects induced by Ar{sup +} irradiation with IG/STM.},
doi = {10.1063/1.2149001},
journal = {Review of Scientific Instruments},
number = 12,
volume = 76,
place = {United States},
year = {Thu Dec 15 00:00:00 EST 2005},
month = {Thu Dec 15 00:00:00 EST 2005}
}
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  • An ultrahigh-vacuum (UHV) differentially pumped low-energy (50--3000 eV) ion beam system for the in situ irradiation of specimens in a UHV atom-probe field-ion microscope (FIM) was designed and constructed. The ion beam system consisted of a Finkelstein-type ion source, an Einzel lens, and a magnetic mass analyzer. The ion source was connected to the analyzer chamber by small apertures which resulted in differential pumping between the ion source and the analyzer chamber; during a typical in situ irradiation of a specimen in the atom-probe FIM the total pressure was maintained at approx. =10/sup -7/ Torr. In the case of heliummore » ion irradiation the optimum ion-current density was approx. =0.5 ..mu..A cm/sup -2/ for 300-eV He/sup +/ ions at the atom-probe FIM specimen. After the completion of a helium ion irradiation the pumpdown time from 5 x 10/sup -7/ to approx. =3 x 10/sup -10/ Torr in the atom-probe FIM chamber was 0.5 h.« less