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Title: Debris characteristics of a laser-produced tin plasma for extreme ultraviolet source

Abstract

We measured debris characteristics of a tin (Sn) plasma produced by a 10-ns infrared Nd:YAG laser. A maximum kinetic energy of 7 keV of tin ions was observed. Such suprathermal tin ions emitted from a solid planar target consisted of singly and doubly ionized tin ions. Both suprathermal ions and neutral fragments emitted from a target showed the angular distributions of cos{sup 4} {theta} which were narrower than the 13.5-nm extreme ultraviolet (EUV) emission distribution of cos{sup 0.5} {theta}. These measurements would give important information on debris mitigation for efficient EUV sources in the next generation lithography.

Authors:
; ; ; ; ; ;  [1];  [2]
  1. Department of Electrical and Electronic Engineering and Photon Science Center, University of Miyazaki, Gakuen Kibanadai Nishi 1-1, Miyazaki 889-2192 (Japan)
  2. (Japan)
Publication Date:
OSTI Identifier:
20778495
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 76; Journal Issue: 12; Other Information: DOI: 10.1063/1.2136874; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ANGULAR DISTRIBUTION; EMISSION; EXTREME ULTRAVIOLET RADIATION; KEV RANGE 01-10; KINETIC ENERGY; LASER-PRODUCED PLASMA; LASERS; PLASMA PRODUCTION; TIN; TIN IONS

Citation Formats

Higashiguchi, Takeshi, Rajyaguru, Chirag, Dojyo, Naoto, Taniguchi, Yosuke, Sakita, Koji, Kubodera, Shoichi, Sasaki, Wataru, and NTP Inc., Gakuen Kibanadai Nishi 1-1, Miyazaki, Miyazaki 889-2192. Debris characteristics of a laser-produced tin plasma for extreme ultraviolet source. United States: N. p., 2005. Web. doi:10.1063/1.2136874.
Higashiguchi, Takeshi, Rajyaguru, Chirag, Dojyo, Naoto, Taniguchi, Yosuke, Sakita, Koji, Kubodera, Shoichi, Sasaki, Wataru, & NTP Inc., Gakuen Kibanadai Nishi 1-1, Miyazaki, Miyazaki 889-2192. Debris characteristics of a laser-produced tin plasma for extreme ultraviolet source. United States. doi:10.1063/1.2136874.
Higashiguchi, Takeshi, Rajyaguru, Chirag, Dojyo, Naoto, Taniguchi, Yosuke, Sakita, Koji, Kubodera, Shoichi, Sasaki, Wataru, and NTP Inc., Gakuen Kibanadai Nishi 1-1, Miyazaki, Miyazaki 889-2192. Thu . "Debris characteristics of a laser-produced tin plasma for extreme ultraviolet source". United States. doi:10.1063/1.2136874.
@article{osti_20778495,
title = {Debris characteristics of a laser-produced tin plasma for extreme ultraviolet source},
author = {Higashiguchi, Takeshi and Rajyaguru, Chirag and Dojyo, Naoto and Taniguchi, Yosuke and Sakita, Koji and Kubodera, Shoichi and Sasaki, Wataru and NTP Inc., Gakuen Kibanadai Nishi 1-1, Miyazaki, Miyazaki 889-2192},
abstractNote = {We measured debris characteristics of a tin (Sn) plasma produced by a 10-ns infrared Nd:YAG laser. A maximum kinetic energy of 7 keV of tin ions was observed. Such suprathermal tin ions emitted from a solid planar target consisted of singly and doubly ionized tin ions. Both suprathermal ions and neutral fragments emitted from a target showed the angular distributions of cos{sup 4} {theta} which were narrower than the 13.5-nm extreme ultraviolet (EUV) emission distribution of cos{sup 0.5} {theta}. These measurements would give important information on debris mitigation for efficient EUV sources in the next generation lithography.},
doi = {10.1063/1.2136874},
journal = {Review of Scientific Instruments},
number = 12,
volume = 76,
place = {United States},
year = {Thu Dec 15 00:00:00 EST 2005},
month = {Thu Dec 15 00:00:00 EST 2005}
}