Effects of pulsing parameters on production and distribution of macroparticles in cathodic vacuum arc deposition
- School of Materials Science and Engineering, Shanghai Jiao Tong University, Shanghai 200240 (China) and Department of Physics and Materials Science, City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong (China)
The effects of pulsing parameters such as the duty cycles, frequencies, and arc currents on the production and distribution of macroparticles (MPs) were studied. A tunable pulsed arc power supply that could provide either direct current (dc) or pulsed current plus dc was used in the experiments. Copper and titanium were used as the cathodes, and glasses were used as the substrate. Optical microscopy, scanning electron microscopy, and special image processing were utilized to investigate the MPs deposited onto the substrate. Our results illustrate the general trend that the MP density increases with higher dc but decreases with increasing pulsing frequency. There is no obvious relationship between the MP density and the duty cycle at high dc but the MP density obviously increases with the duty cycle at low dc.
- OSTI ID:
- 20777354
- Journal Information:
- Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Vol. 24, Issue 4; Other Information: DOI: 10.1116/1.2201046; (c) 2006 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 1553-1813
- Country of Publication:
- United States
- Language:
- English
Similar Records
Graphite macroparticle filtering efficiency of three different magnetic filter designs used in the filtered cathodic vacuum arc deposition of tetrahedral amorphous carbon films. [C; graphite]
Macroparticle-free thin films produced by an efficient vacuum arc deposition technique