Improvement of materials surface properties by rf glow discharge treatment

Journal Article · Sat Jul 15 00:00:00 EDT 2006 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films

DOI:https://doi.org/10.1116/1.2197507· OSTI ID:20777342

Huang, T B; Chen, X; Tian, X Q; Cha, L Z ^[1]

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1. Department of Electronic Engineering, Tsinghua University, Beijing 100084 (China)

Materials surface properties were improved by the application of a rf glow discharge treatment for vacuum and electronic applications. The surface morphology was studied under different glow discharge treatments and it could be shown by experiments that the roughness of materials surface varied due to the glow discharge treating process and that a clean and smooth surface could be obtained after the treatment. The experimental results revealed that the outgassing rates for different gases decreased and the evacuating properties for the materials improved following the application of the glow discharge treatment.

• OSTI ID: 20777342
• Journal Information: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Vol. 24, Issue 4; Other Information: DOI: 10.1116/1.2197507; (c) 2006 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 1553-1813
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
DEGASSING
GLOW DISCHARGES
MORPHOLOGY
PLASMA
PROCESSING
ROUGHNESS
SURFACES