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Title: Transparent conductive Cd{sub 3}TeO{sub 6} thin films with perovskite structure

Abstract

Transparent conductive Cd{sub 3}TeO{sub 6} thin films were deposited by radio-frequency magnetron sputtering using a target composed of CdO and TeO{sub 2} powders, and these films' electrical and optical properties were examined. The electrical resistivity of 1.9x10{sup -2} {omega} cm and an average transmittance above 85% in the visible region (400-800 nm) were obtained after annealing the film at 500 deg. C. The film's carrier density and Hall mobility were 8.7x10{sup 19} cm{sup -3} and 6.8 cm{sup 2} V{sup -1} s{sup -1}, respectively. The absorption edge of the films was shifted to a lower wavelength by increasing the carrier density. The maximum band gap of these films was found to be 3.69 eV.

Authors:
; ; ; ;  [1];  [2]
  1. Department of Applied Chemistry, Faculty of Engineering, Utsunomiya University, 7-1-2 Yoto, Utsunomiya 321-8585 (Japan)
  2. (Japan)
Publication Date:
OSTI Identifier:
20777056
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films; Journal Volume: 24; Journal Issue: 2; Other Information: DOI: 10.1116/1.2172950; (c) 2006 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ABSORPTION; ANNEALING; CADMIUM OXIDES; CARRIER DENSITY; DEPOSITION; ELECTRIC CONDUCTIVITY; EV RANGE 01-10; MAGNETRONS; MOBILITY; OPTICAL PROPERTIES; PEROVSKITE; POWDERS; RADIOWAVE RADIATION; TELLURIUM OXIDES; THIN FILMS; VISIBLE SPECTRA

Citation Formats

Tetsuka, Hiroyuki, Shan Yuejin, Tezuka, Keitaro, Imoto, Hideo, Wasa, Kiyotaka, and Faculty of Science, Yokohama City University, 2-7-27 Chiyogaoka, Nara 631-0045. Transparent conductive Cd{sub 3}TeO{sub 6} thin films with perovskite structure. United States: N. p., 2006. Web. doi:10.1116/1.2172950.
Tetsuka, Hiroyuki, Shan Yuejin, Tezuka, Keitaro, Imoto, Hideo, Wasa, Kiyotaka, & Faculty of Science, Yokohama City University, 2-7-27 Chiyogaoka, Nara 631-0045. Transparent conductive Cd{sub 3}TeO{sub 6} thin films with perovskite structure. United States. doi:10.1116/1.2172950.
Tetsuka, Hiroyuki, Shan Yuejin, Tezuka, Keitaro, Imoto, Hideo, Wasa, Kiyotaka, and Faculty of Science, Yokohama City University, 2-7-27 Chiyogaoka, Nara 631-0045. Wed . "Transparent conductive Cd{sub 3}TeO{sub 6} thin films with perovskite structure". United States. doi:10.1116/1.2172950.
@article{osti_20777056,
title = {Transparent conductive Cd{sub 3}TeO{sub 6} thin films with perovskite structure},
author = {Tetsuka, Hiroyuki and Shan Yuejin and Tezuka, Keitaro and Imoto, Hideo and Wasa, Kiyotaka and Faculty of Science, Yokohama City University, 2-7-27 Chiyogaoka, Nara 631-0045},
abstractNote = {Transparent conductive Cd{sub 3}TeO{sub 6} thin films were deposited by radio-frequency magnetron sputtering using a target composed of CdO and TeO{sub 2} powders, and these films' electrical and optical properties were examined. The electrical resistivity of 1.9x10{sup -2} {omega} cm and an average transmittance above 85% in the visible region (400-800 nm) were obtained after annealing the film at 500 deg. C. The film's carrier density and Hall mobility were 8.7x10{sup 19} cm{sup -3} and 6.8 cm{sup 2} V{sup -1} s{sup -1}, respectively. The absorption edge of the films was shifted to a lower wavelength by increasing the carrier density. The maximum band gap of these films was found to be 3.69 eV.},
doi = {10.1116/1.2172950},
journal = {Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films},
number = 2,
volume = 24,
place = {United States},
year = {Wed Mar 15 00:00:00 EST 2006},
month = {Wed Mar 15 00:00:00 EST 2006}
}