skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Ultrasensitive leak detection during ultrahigh vacuum evacuation by quadrupole mass spectrometer

Abstract

One must do ultrasensitive leak detection during ultrahigh-vacuum (UHV) evacuation, especially just before the device is sealed off from the vacuum system, to guarantee the longevity of the sealed high-vacuum or even UHV devices with small volume. A quadrupole mass spectrometer (QMS) with an UHV evacuation system can be used under accumulation mode to do the testing. Possible accumulate modes, as well as their advantages and shortcomings, are studied experimentally and discussed in this paper. We found that the opening action of the metal valve during accumulation mode always severely affects the height of the peak indicated by QMS and causes considerable errors. If we determine the leak rate by the peak area instead of the peak height, the situation is much improved. This method has proven quite useful in ensuring the tightness quality for complex sealed UHV devices with small volumes. Ultrasensitive leak detection has been carried out for such real evacuating devices, and a leak rate of 2x10{sup -14} Pa{center_dot}m{sup 3}/s was detected, which is far lower than its dynamic mode and the detection limit of the current advanced commercial leak detectors.

Authors:
; ; ; ;  [1]
  1. Department of Electronic Engineering, Tsinghua University, Beijing, 100084 (China)
Publication Date:
OSTI Identifier:
20776952
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films; Journal Volume: 24; Journal Issue: 1; Other Information: DOI: 10.1116/1.2137330; (c) 2006 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; DETECTION; LEAK DETECTORS; LEAKS; MASS SPECTROMETERS; OPENINGS; PEAKS; TESTING; VACUUM SYSTEMS; VALVES

Citation Formats

Chen Xu, Huang Tianbin, Wang Ligong, Jin Qiji, and Cha Liangzhen. Ultrasensitive leak detection during ultrahigh vacuum evacuation by quadrupole mass spectrometer. United States: N. p., 2006. Web. doi:10.1116/1.2137330.
Chen Xu, Huang Tianbin, Wang Ligong, Jin Qiji, & Cha Liangzhen. Ultrasensitive leak detection during ultrahigh vacuum evacuation by quadrupole mass spectrometer. United States. doi:10.1116/1.2137330.
Chen Xu, Huang Tianbin, Wang Ligong, Jin Qiji, and Cha Liangzhen. Sun . "Ultrasensitive leak detection during ultrahigh vacuum evacuation by quadrupole mass spectrometer". United States. doi:10.1116/1.2137330.
@article{osti_20776952,
title = {Ultrasensitive leak detection during ultrahigh vacuum evacuation by quadrupole mass spectrometer},
author = {Chen Xu and Huang Tianbin and Wang Ligong and Jin Qiji and Cha Liangzhen},
abstractNote = {One must do ultrasensitive leak detection during ultrahigh-vacuum (UHV) evacuation, especially just before the device is sealed off from the vacuum system, to guarantee the longevity of the sealed high-vacuum or even UHV devices with small volume. A quadrupole mass spectrometer (QMS) with an UHV evacuation system can be used under accumulation mode to do the testing. Possible accumulate modes, as well as their advantages and shortcomings, are studied experimentally and discussed in this paper. We found that the opening action of the metal valve during accumulation mode always severely affects the height of the peak indicated by QMS and causes considerable errors. If we determine the leak rate by the peak area instead of the peak height, the situation is much improved. This method has proven quite useful in ensuring the tightness quality for complex sealed UHV devices with small volumes. Ultrasensitive leak detection has been carried out for such real evacuating devices, and a leak rate of 2x10{sup -14} Pa{center_dot}m{sup 3}/s was detected, which is far lower than its dynamic mode and the detection limit of the current advanced commercial leak detectors.},
doi = {10.1116/1.2137330},
journal = {Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films},
number = 1,
volume = 24,
place = {United States},
year = {Sun Jan 15 00:00:00 EST 2006},
month = {Sun Jan 15 00:00:00 EST 2006}
}