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Title: Effect of assistant rf field on phase composition of iron nitride film prepared by magnetron sputtering process

Abstract

Fe-N thin films were fabricated using a direct current magnetron sputtering process assisted by a radio-frequency (rf) field. The effect of the rf field on the phase composition of the films was investigated. The results indicate that with the assistance of the rf field, various kinds of iron nitrides can be obtained in the films, including {alpha}{sup '}-Fe-N, {alpha}{sup ''}-Fe{sub 16}N{sub 2}, {xi}-Fe{sub 2}N, {epsilon}-Fe{sub 3}N, and {gamma}{sup ''}-FeN with ZnS structure. It was found that the rf field greatly benefits the formation of iron nitrides in the Fe-N films.

Authors:
; ;  [1];  [2];  [2]
  1. Department of Materials Physics and Chemistry, Harbin Institute of Technology, Harbin 150001 (China)
  2. (China)
Publication Date:
OSTI Identifier:
20776943
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films; Journal Volume: 24; Journal Issue: 1; Other Information: DOI: 10.1116/1.2148415; (c) 2006 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; DEPOSITION; DIRECT CURRENT; FERROMAGNETIC MATERIALS; IRON NITRIDES; MAGNETRONS; RADIOWAVE RADIATION; SPUTTERING; THIN FILMS; ZINC SULFIDES

Citation Formats

Li, W.L., Zheng, F., Fei, W.D., Department of Applied Physics, Harbin Institute of Technology, Harbin 150001, and Department of Materials Physics and Chemistry, Harbin Institute of Technology, Harbin 150001. Effect of assistant rf field on phase composition of iron nitride film prepared by magnetron sputtering process. United States: N. p., 2006. Web. doi:10.1116/1.2148415.
Li, W.L., Zheng, F., Fei, W.D., Department of Applied Physics, Harbin Institute of Technology, Harbin 150001, & Department of Materials Physics and Chemistry, Harbin Institute of Technology, Harbin 150001. Effect of assistant rf field on phase composition of iron nitride film prepared by magnetron sputtering process. United States. doi:10.1116/1.2148415.
Li, W.L., Zheng, F., Fei, W.D., Department of Applied Physics, Harbin Institute of Technology, Harbin 150001, and Department of Materials Physics and Chemistry, Harbin Institute of Technology, Harbin 150001. Sun . "Effect of assistant rf field on phase composition of iron nitride film prepared by magnetron sputtering process". United States. doi:10.1116/1.2148415.
@article{osti_20776943,
title = {Effect of assistant rf field on phase composition of iron nitride film prepared by magnetron sputtering process},
author = {Li, W.L. and Zheng, F. and Fei, W.D. and Department of Applied Physics, Harbin Institute of Technology, Harbin 150001 and Department of Materials Physics and Chemistry, Harbin Institute of Technology, Harbin 150001},
abstractNote = {Fe-N thin films were fabricated using a direct current magnetron sputtering process assisted by a radio-frequency (rf) field. The effect of the rf field on the phase composition of the films was investigated. The results indicate that with the assistance of the rf field, various kinds of iron nitrides can be obtained in the films, including {alpha}{sup '}-Fe-N, {alpha}{sup ''}-Fe{sub 16}N{sub 2}, {xi}-Fe{sub 2}N, {epsilon}-Fe{sub 3}N, and {gamma}{sup ''}-FeN with ZnS structure. It was found that the rf field greatly benefits the formation of iron nitrides in the Fe-N films.},
doi = {10.1116/1.2148415},
journal = {Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films},
number = 1,
volume = 24,
place = {United States},
year = {Sun Jan 15 00:00:00 EST 2006},
month = {Sun Jan 15 00:00:00 EST 2006}
}