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Title: In situ Fourier transform infrared characterization of the plasma chemistry in varying pulsed cycles of a 1,3-butadiene discharge in an inductively coupled gaseous electronics conference cell

Abstract

In situ Fourier transform infrared spectroscopy is used to characterize the plasma chemistry of pulsed 1,3-butadiene (H{sub 2}C=CHCH=CH{sub 2}) discharges subject to varying percentages of the duty cycle in a gaseous electronics conference cell. Variations in densities associated with the major observed spectral bands are closely examined as a function of duty cycle. The possible dissociation mechanisms responsible for all observed vibrations are investigated. For example, the data show that about 44% of CH{sub 2} stretching vibrations during continuous wave biasing are due to free CH{sub 2} daughter species, while only bound CH{sub 2} are observed during pulsing of the discharge. This indicates that only the {pi} bond of the C=C bond is cleaved during pulsed mode operation, with the {sigma} being cleaved during cw biasing.

Authors:
; ; ;  [1]
  1. Department of Electrical Engineering and Computer Science, University of Texas at Dallas, 2601 North Floyd Drive, Richardson, Texas 75083 (United States)
Publication Date:
OSTI Identifier:
20776940
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films; Journal Volume: 24; Journal Issue: 1; Other Information: DOI: 10.1116/1.2141618; (c) 2006 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
37 INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY; BUTADIENE; CHEMISTRY; DENSITY; DISSOCIATION; ELECTRIC DISCHARGES; FOURIER TRANSFORM SPECTROMETERS; FOURIER TRANSFORMATION; INFRARED SPECTRA; PLASMA; PLASMA DIAGNOSTICS

Citation Formats

Jindal, A.K., Prengler, A.J., Overzet, L.J., and Goeckner, M.J. In situ Fourier transform infrared characterization of the plasma chemistry in varying pulsed cycles of a 1,3-butadiene discharge in an inductively coupled gaseous electronics conference cell. United States: N. p., 2006. Web. doi:10.1116/1.2141618.
Jindal, A.K., Prengler, A.J., Overzet, L.J., & Goeckner, M.J. In situ Fourier transform infrared characterization of the plasma chemistry in varying pulsed cycles of a 1,3-butadiene discharge in an inductively coupled gaseous electronics conference cell. United States. doi:10.1116/1.2141618.
Jindal, A.K., Prengler, A.J., Overzet, L.J., and Goeckner, M.J. Sun . "In situ Fourier transform infrared characterization of the plasma chemistry in varying pulsed cycles of a 1,3-butadiene discharge in an inductively coupled gaseous electronics conference cell". United States. doi:10.1116/1.2141618.
@article{osti_20776940,
title = {In situ Fourier transform infrared characterization of the plasma chemistry in varying pulsed cycles of a 1,3-butadiene discharge in an inductively coupled gaseous electronics conference cell},
author = {Jindal, A.K. and Prengler, A.J. and Overzet, L.J. and Goeckner, M.J.},
abstractNote = {In situ Fourier transform infrared spectroscopy is used to characterize the plasma chemistry of pulsed 1,3-butadiene (H{sub 2}C=CHCH=CH{sub 2}) discharges subject to varying percentages of the duty cycle in a gaseous electronics conference cell. Variations in densities associated with the major observed spectral bands are closely examined as a function of duty cycle. The possible dissociation mechanisms responsible for all observed vibrations are investigated. For example, the data show that about 44% of CH{sub 2} stretching vibrations during continuous wave biasing are due to free CH{sub 2} daughter species, while only bound CH{sub 2} are observed during pulsing of the discharge. This indicates that only the {pi} bond of the C=C bond is cleaved during pulsed mode operation, with the {sigma} being cleaved during cw biasing.},
doi = {10.1116/1.2141618},
journal = {Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films},
number = 1,
volume = 24,
place = {United States},
year = {Sun Jan 15 00:00:00 EST 2006},
month = {Sun Jan 15 00:00:00 EST 2006}
}
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