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Title: Electrical breakdown characteristics of an atmospheric pressure rf capacitive plasma source

Abstract

The electrical breakdown characteristics of the rf capacitive plasma source are investigated theoretically and experimentally. The plasma source is the electrode type consisting of the concentric cylinders for generating nonequilibrium plasma at atmospheric pressure. The theoretical model based on the diffusion-controlled breakdown mechanism is proposed to analyze the electrical breakdown phenomenon in this rf capacitive plasma source of the coaxial cylinders. The electron temperature at the electrical breakdown is calculated from the theoretical model, thereby evaluating the electrical breakdown voltages. The experimental data of the electrical breakdown voltage are measured with respect to the variation of the geometric parameters of plasma source, the gas temperature, and the concentration of the foreign reactive gases (oxygen and nitrogen) mixed in the helium gas. The theoretical results of the electrical breakdown voltage agree remarkably well with experimental data. This indicates that not only the electron temperature is important in determining the electrical breakdown voltage, but also the geometric variables, the gas temperature, and the scattering cross sections of molecules play significant roles.

Authors:
; ;  [1]
  1. Department of Molecular Science and Technology, Ajou University, San 5 Wonchon-Dong, Youngtong-Gu, Suwon 443-749 (Korea, Republic of)
Publication Date:
OSTI Identifier:
20764565
Resource Type:
Journal Article
Journal Name:
Physics of Plasmas
Additional Journal Information:
Journal Volume: 12; Journal Issue: 9; Other Information: DOI: 10.1063/1.2035447; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1070-664X
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ATMOSPHERIC PRESSURE; CHARGED-PARTICLE TRANSPORT; CROSS SECTIONS; DIFFUSION; ELECTRIC POTENTIAL; ELECTRICAL FAULTS; ELECTRODES; ELECTRON TEMPERATURE; HELIUM; ION TEMPERATURE; MOLECULES; NITROGEN; NON-EQUILIBRIUM PLASMA; OXYGEN; SCATTERING; VARIATIONS

Citation Formats

Shouzhe, Li, Kang, Jung G, and Uhm, Han S. Electrical breakdown characteristics of an atmospheric pressure rf capacitive plasma source. United States: N. p., 2005. Web. doi:10.1063/1.2035447.
Shouzhe, Li, Kang, Jung G, & Uhm, Han S. Electrical breakdown characteristics of an atmospheric pressure rf capacitive plasma source. United States. https://doi.org/10.1063/1.2035447
Shouzhe, Li, Kang, Jung G, and Uhm, Han S. 2005. "Electrical breakdown characteristics of an atmospheric pressure rf capacitive plasma source". United States. https://doi.org/10.1063/1.2035447.
@article{osti_20764565,
title = {Electrical breakdown characteristics of an atmospheric pressure rf capacitive plasma source},
author = {Shouzhe, Li and Kang, Jung G and Uhm, Han S},
abstractNote = {The electrical breakdown characteristics of the rf capacitive plasma source are investigated theoretically and experimentally. The plasma source is the electrode type consisting of the concentric cylinders for generating nonequilibrium plasma at atmospheric pressure. The theoretical model based on the diffusion-controlled breakdown mechanism is proposed to analyze the electrical breakdown phenomenon in this rf capacitive plasma source of the coaxial cylinders. The electron temperature at the electrical breakdown is calculated from the theoretical model, thereby evaluating the electrical breakdown voltages. The experimental data of the electrical breakdown voltage are measured with respect to the variation of the geometric parameters of plasma source, the gas temperature, and the concentration of the foreign reactive gases (oxygen and nitrogen) mixed in the helium gas. The theoretical results of the electrical breakdown voltage agree remarkably well with experimental data. This indicates that not only the electron temperature is important in determining the electrical breakdown voltage, but also the geometric variables, the gas temperature, and the scattering cross sections of molecules play significant roles.},
doi = {10.1063/1.2035447},
url = {https://www.osti.gov/biblio/20764565}, journal = {Physics of Plasmas},
issn = {1070-664X},
number = 9,
volume = 12,
place = {United States},
year = {2005},
month = {9}
}