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Title: Synthesis and Deposition of Nanoparticles Using a Hypersonically Expanded Plasma

Abstract

Si-Ti-N nanostructured coatings were synthesized by inertial impaction of nanoparticles using a process called hypersonic plasma particle deposition (HPPD). Transmission electron microscopy on samples prepared by focused ion beam (FIB) milling show TiN nanocrystallites in an amorphous matrix. X-ray photoelectron spectroscopy results indicate the presence of amorphous Si3N4 in similar films. In-situ particle size distribution measurements show that particle size distributions peak around 14 nm under typical operating conditions.

Authors:
; ; ; ; ;  [1]
  1. Department of Mechanical Engineering, University of Minnesota, 111 Church Street SE, Minneapolis, MN (United States)
Publication Date:
OSTI Identifier:
20726830
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 799; Journal Issue: 1; Conference: 4. international conference on the physics of dusty plasmas, Orleans (France), 13-17 Jun 2005; Other Information: DOI: 10.1063/1.2134678; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; COATINGS; DEPOSITION; DISTRIBUTION; FILMS; ION BEAMS; MILLING; NANOSTRUCTURES; PARTICLE SIZE; PARTICLES; PLASMA; SYNTHESIS; TITANIUM NITRIDES; TRANSMISSION ELECTRON MICROSCOPY; ULTRASONIC WAVES; X-RAY PHOTOELECTRON SPECTROSCOPY

Citation Formats

Hafiz, Jami, Wang Xiaoliang, Mukherjee, Rajesh, McMurry, Peter H., Heberlein, Joachim V.R., and Girshick, Steven L. Synthesis and Deposition of Nanoparticles Using a Hypersonically Expanded Plasma. United States: N. p., 2005. Web. doi:10.1063/1.2134678.
Hafiz, Jami, Wang Xiaoliang, Mukherjee, Rajesh, McMurry, Peter H., Heberlein, Joachim V.R., & Girshick, Steven L. Synthesis and Deposition of Nanoparticles Using a Hypersonically Expanded Plasma. United States. doi:10.1063/1.2134678.
Hafiz, Jami, Wang Xiaoliang, Mukherjee, Rajesh, McMurry, Peter H., Heberlein, Joachim V.R., and Girshick, Steven L. Mon . "Synthesis and Deposition of Nanoparticles Using a Hypersonically Expanded Plasma". United States. doi:10.1063/1.2134678.
@article{osti_20726830,
title = {Synthesis and Deposition of Nanoparticles Using a Hypersonically Expanded Plasma},
author = {Hafiz, Jami and Wang Xiaoliang and Mukherjee, Rajesh and McMurry, Peter H. and Heberlein, Joachim V.R. and Girshick, Steven L.},
abstractNote = {Si-Ti-N nanostructured coatings were synthesized by inertial impaction of nanoparticles using a process called hypersonic plasma particle deposition (HPPD). Transmission electron microscopy on samples prepared by focused ion beam (FIB) milling show TiN nanocrystallites in an amorphous matrix. X-ray photoelectron spectroscopy results indicate the presence of amorphous Si3N4 in similar films. In-situ particle size distribution measurements show that particle size distributions peak around 14 nm under typical operating conditions.},
doi = {10.1063/1.2134678},
journal = {AIP Conference Proceedings},
number = 1,
volume = 799,
place = {United States},
year = {Mon Oct 31 00:00:00 EST 2005},
month = {Mon Oct 31 00:00:00 EST 2005}
}