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Title: Energy distribution of ion species in Ar/CH4, Ar/C2H2, and Ar/C3H6 radio-frequency plasmas

Abstract

Molecule and particle formation in a capacitively coupled radio-frequency discharge has been investigated. Formation of molecular ions has been studied by means of plasma process monitoring employing energy-dispersive mass spectrometry. In addition, the influence of dust particles on the energy distribution of plasma ions was investigated.

Authors:
;  [1];  [2]
  1. Institut fuer Physik, Ernst-Moritz-Arndt-Universitaet Greifswald, Domstrasse 10a, 17489 Greifswald (Germany)
  2. INP Greifswald, Friedrich-Ludwig-Jahn-Strasse 19, 17489 Greifswald (Germany)
Publication Date:
OSTI Identifier:
20726792
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 799; Journal Issue: 1; Conference: 4. international conference on the physics of dusty plasmas, Orleans (France), 13-17 Jun 2005; Other Information: DOI: 10.1063/1.2134643; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ARGON; DUSTS; ENERGY SPECTRA; HIGH-FREQUENCY DISCHARGES; MASS SPECTROSCOPY; METHANE; MOLECULAR IONS; MOLECULES; MONITORING; PARTICLES; PLASMA; PLASMA DIAGNOSTICS; RADIOWAVE RADIATION

Citation Formats

Hoang Tung Do, Hippler, Rainer, and Thieme, Gabriele. Energy distribution of ion species in Ar/CH4, Ar/C2H2, and Ar/C3H6 radio-frequency plasmas. United States: N. p., 2005. Web. doi:10.1063/1.2134643.
Hoang Tung Do, Hippler, Rainer, & Thieme, Gabriele. Energy distribution of ion species in Ar/CH4, Ar/C2H2, and Ar/C3H6 radio-frequency plasmas. United States. doi:10.1063/1.2134643.
Hoang Tung Do, Hippler, Rainer, and Thieme, Gabriele. Mon . "Energy distribution of ion species in Ar/CH4, Ar/C2H2, and Ar/C3H6 radio-frequency plasmas". United States. doi:10.1063/1.2134643.
@article{osti_20726792,
title = {Energy distribution of ion species in Ar/CH4, Ar/C2H2, and Ar/C3H6 radio-frequency plasmas},
author = {Hoang Tung Do and Hippler, Rainer and Thieme, Gabriele},
abstractNote = {Molecule and particle formation in a capacitively coupled radio-frequency discharge has been investigated. Formation of molecular ions has been studied by means of plasma process monitoring employing energy-dispersive mass spectrometry. In addition, the influence of dust particles on the energy distribution of plasma ions was investigated.},
doi = {10.1063/1.2134643},
journal = {AIP Conference Proceedings},
number = 1,
volume = 799,
place = {United States},
year = {Mon Oct 31 00:00:00 EST 2005},
month = {Mon Oct 31 00:00:00 EST 2005}
}