Bleecker, K. de, Bogaerts, A., and Goedheer, W.J.. Nanoparticle growth and transport mechanisms in capacitively coupled silane discharges: a numerical investigation. United States: N. p., 2005.
Web. doi:10.1063/1.2134600.
Bleecker, K. de, Bogaerts, A., & Goedheer, W.J.. Nanoparticle growth and transport mechanisms in capacitively coupled silane discharges: a numerical investigation. United States. doi:10.1063/1.2134600.
Bleecker, K. de, Bogaerts, A., and Goedheer, W.J.. Mon .
"Nanoparticle growth and transport mechanisms in capacitively coupled silane discharges: a numerical investigation". United States.
doi:10.1063/1.2134600.
@article{osti_20726747,
title = {Nanoparticle growth and transport mechanisms in capacitively coupled silane discharges: a numerical investigation},
author = {Bleecker, K. de and Bogaerts, A. and Goedheer, W.J.},
abstractNote = {A self-consistent 1D fluid model is used to investigate the formation, growth and transport mechanisms of sub-micrometer particles in a low pressure capacitively coupled radio-frequency silane (SiH4) discharge. In this contribution we analyze the competition between the different forces governing the transport of nanometer-sized particles and the specific role of the thermophoretic force arising from a thermal gradient in gas temperature induced by heating or cooling of the electrodes. Further growth of the nanoparticles due to coagulation is also described by coupling the 1D fluid model with an aerosol dynamics model.},
doi = {10.1063/1.2134600},
journal = {AIP Conference Proceedings},
number = 1,
volume = 799,
place = {United States},
year = {Mon Oct 31 00:00:00 EST 2005},
month = {Mon Oct 31 00:00:00 EST 2005}
}