Nanoparticle growth and transport mechanisms in capacitively coupled silane discharges: a numerical investigation

doi:10.1063/1.2134600

Title: Nanoparticle growth and transport mechanisms in capacitively coupled silane discharges: a numerical investigation

Full Record
Other Related Research

Abstract

A self-consistent 1D fluid model is used to investigate the formation, growth and transport mechanisms of sub-micrometer particles in a low pressure capacitively coupled radio-frequency silane (SiH4) discharge. In this contribution we analyze the competition between the different forces governing the transport of nanometer-sized particles and the specific role of the thermophoretic force arising from a thermal gradient in gas temperature induced by heating or cooling of the electrodes. Further growth of the nanoparticles due to coagulation is also described by coupling the 1D fluid model with an aerosol dynamics model.

Authors:

Bleecker, K. de; Bogaerts, A. ^[1]; Goedheer, W.J. ^[2]

PLASMANT, Dept. of Chemistry, University of Antwerp (Ukraine), Universiteitsplein 1, 2610 Wilrijk (Belgium)
FOM Institute for Plasma Physics 'Rijnhuizen', Association EURATOM-FOM, Trilateral Euregio Cluster, P.O. Box 1207, 3430 BE Nieuwegein (Netherlands)

Publication Date:: Mon Oct 31 00:00:00 EST 2005

OSTI Identifier:: 20726747

Resource Type:: Journal Article

Resource Relation:: Journal Name: AIP Conference Proceedings; Journal Volume: 799; Journal Issue: 1; Conference: 4. international conference on the physics of dusty plasmas, Orleans (France), 13-17 Jun 2005; Other Information: DOI: 10.1063/1.2134600; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)

Country of Publication:: United States

Language:: English

Subject:: 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; AEROSOLS; ELECTRODES; FLUIDS; HIGH-FREQUENCY DISCHARGES; NANOSTRUCTURES; NUMERICAL ANALYSIS; PARTICLES; PLASMA; PLASMA SIMULATION; RADIOWAVE RADIATION; SILANES; TEMPERATURE GRADIENTS

Citation Formats


                    Bleecker, K. de, Bogaerts, A., and Goedheer, W.J. Nanoparticle growth and transport mechanisms in capacitively coupled silane discharges: a numerical investigation.  United States: N. p., 2005. 
        Web.  doi:10.1063/1.2134600.

Copy to clipboard


                    Bleecker, K. de, Bogaerts, A., & Goedheer, W.J. Nanoparticle growth and transport mechanisms in capacitively coupled silane discharges: a numerical investigation.  United States.  doi:10.1063/1.2134600.

Copy to clipboard


                    Bleecker, K. de, Bogaerts, A., and Goedheer, W.J. Mon .  
        "Nanoparticle growth and transport mechanisms in capacitively coupled silane discharges: a numerical investigation".  United States.  
        doi:10.1063/1.2134600.

Copy to clipboard


                    
@article{osti_20726747,

  title        = {Nanoparticle growth and transport mechanisms in capacitively coupled silane discharges: a numerical investigation},

  author       = {Bleecker, K. de and Bogaerts, A. and Goedheer, W.J.},

  abstractNote = {A self-consistent 1D fluid model is used to investigate the formation, growth and transport mechanisms of sub-micrometer particles in a low pressure capacitively coupled radio-frequency silane (SiH4) discharge. In this contribution we analyze the competition between the different forces governing the transport of nanometer-sized particles and the specific role of the thermophoretic force arising from a thermal gradient in gas temperature induced by heating or cooling of the electrodes. Further growth of the nanoparticles due to coagulation is also described by coupling the 1D fluid model with an aerosol dynamics model.},

  doi          = {10.1063/1.2134600},

  journal      = {AIP Conference Proceedings},

  number       = 1,

  volume       = 799,

  place        = {United States},

  year         = {Mon Oct 31 00:00:00 EST 2005},

  month        = {Mon Oct 31 00:00:00 EST 2005}

}

Copy to clipboard

Journal Article:

DOI: 10.1063/1.2134600

Other availability

Find in Google Scholar

Search WorldCat to find libraries that may hold this journal

Save / Share:

Export Metadata

Save to My Library

Similar records in OSTI.GOV collections:

Phase-shift effects on growth and transport of dust particles in VHF capacitively coupled silane discharges: Two dimensional fluid simulation

Journal Article Liu Xiangmei ; Song Yuanhong ; Xu Xiang ; ... - Physics of Plasmas

A two-dimensional (2D) self-consistent fluid model is developed to describe the formation, subsequent growth, transport, and charging mechanisms of nanoparticles in a capacitively coupled silane discharge applied by two very high frequency (VHF) sources with phase shift. In this discharge process, large anions are produced by a series of chemical reactions of anions with silane molecules, while the lower limit of the initial nanoparticles are taken as large anions (Si{sub 12}H{sub 25}{sup -} and Si{sub 12}H{sub 24}{sup -}) to directly link the coagulation module with the nucleation module. And then, by using the coagulation module, the particle number density quicklymore »« less
DOI: 10.1063/1.3626544
Simulation of dust particles in dual-frequency capacitively coupled silane discharges

Journal Article Liu Xiangmei ; Song Yuanhong ; Xu Xiang ; ... - Physical Review. E, Statistical, Nonlinear, and Soft Matter Physics (Print)

The behavior of nanoparticles in dual-frequency capacitively coupled silane discharges is investigated by employing a one-dimensional self-consistent fluid model. The numerical simulation tries to trace the formation, charging, growth, and transport of dust particles during the discharge, under the influences of the high- and low-frequency electric sources, as well as the gas pressure. The effects of the presence of the nanoparticles and larger anions on the plasma properties are also discussed, especially, for the bulk potential, electron temperature, and densities of various particles. The calculation results show that the nanoparticle density and charge distribution are mainly influenced by the voltagemore »« less
DOI: 10.1103/PHYSREVE.81.016405
Some aspects of dissipation mechanisms in chlorine containing capacitively coupled discharges

Journal Article Franz, Gerhard - Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films

The temperature of gaseous neutrals in capacitively coupled discharges of chlorine, argon, and hydrogen has been measured using optical emission spectroscopy. This has been accomplished by adding small amounts of nitrogen to the ambient. The temperature can then be obtained by fitting the unresolved second rotational positive band of nitrogen. It has been found that the gaseous temperature in argon saturates for higher pressures logarithmically, whereas in chlorine, a linear behavior is observed up to the highest pressures and power inputs. Highest temperatures in chlorine have been found to be about 1100 deg. C, whereas in hydrogen, temperatures higher thanmore »« less
DOI: 10.1116/1.2198861
Experimental and numerical investigations of electron density in low-pressure dual-frequency capacitively coupled oxygen discharges

Journal Article Liu, Jia ; Wen, De-Qi ; Liu, Yong-Xin ; ... - Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films

The electron density is measured in low-pressure dual-frequency (2/60 MHz) capacitively coupled oxygen discharges by utilizing a floating hairpin probe. The dependence of electron density at the discharge center on the high frequency (HF) power, low frequency (LF) power, and gas pressure are investigated in detail. A (1D) particle-in-cell/Monte Carlo method is developed to calculate the time-averaged electron density at the discharge center and the simulation results are compared with the experimental ones, and general agreements are achieved. With increasing HF power, the electron density linearly increases. The electron density exhibits different changes with the LF power at different HFmore »« less
DOI: 10.1116/1.4822059
Experimental and numerical investigations of the phase-shift effect in capacitively coupled discharges

Journal Article Gao, Fei ; Zhang, Yu-Ru ; Zhao, Shu-Xia ; ... - Physics of Plasmas

The phase-shift effect has been investigated by a Langmuir probe and a fluid model in Ar capacitively coupled plasmas at 50 mTorr. In the discharge, two sources with the same frequency, i.e., 27.12 MHz, are applied on the top and bottom electrodes simultaneously, and the phase shift between them varies from 0 to π. It is found that the electron density has an off-axis peak near the radial edge when the phase difference is equal to 0 due to the electrostatic edge effect, and the best radial uniformity is observed at a phase difference equal to π. Furthermore, when the voltagemore »« less
DOI: 10.1063/1.4892948

Similar Records