Absolute calibration of extreme ultraviolet optical components with an x-ray-induced fluorescence source
- Institute of Laser Engineering, Osaka University, 2-6 Yamada-Oka, Suita, Osaka 565-0871 (Japan)
A calibration system for extreme ultraviolet (EUV) optical components has been developed. In the system, x rays from a conventional tube induce fluorescence in source materials, which is detected with a gas flow counter or a charge-coupled device detector. The transmittance of an EUV filter (Zr foil) and the diffraction efficiency of a grazing incidence grating were measured and compared with measurements by other sources and calculations. The measured transmission of a filter for 13.5 nm light was 14.4%{+-}0.6%, which agrees well with 14.55% measured with synchrotron orbital radiation. As for the gratings, the first-order diffraction shows good agreement with the model calculation, while the second order one has a remarkable discrepancy between the measurement and the calculation.
- OSTI ID:
- 20723237
- Journal Information:
- Review of Scientific Instruments, Vol. 76, Issue 11; Other Information: DOI: 10.1063/1.2135287; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
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