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Title: Use of glovebags for less hazardous working conditions during the maintenance operations on molecular-beam epitaxy systems

Abstract

No abstract prepared.

Authors:
; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ;  [1]
  1. Microelectronics Research Center, University of Texas at Austin, Austin, Texas 78712 (United States)
Publication Date:
OSTI Identifier:
20723219
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films; Journal Volume: 23; Journal Issue: 6; Other Information: DOI: 10.1116/1.2091119; (c) 2005 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; CRYSTAL GROWTH; HEALTH HAZARDS; MAINTENANCE; MOLECULAR BEAM EPITAXY; OCCUPATIONAL SAFETY; PROTECTIVE CLOTHING; WORKING CONDITIONS

Citation Formats

Oye, Michael M., Ahn, J., Cao, C., Chen, H., Fordyce, W., Gazula, D., Govindaraju, S., Hurst, J.B., Lipson, S., Lu, D., Reifsnider, J.M., Shchekin, O., Sidhu, R., Sun, X., Deppe, D.G., Holmes, A.L. Jr., and Mattord, Terry J. Use of glovebags for less hazardous working conditions during the maintenance operations on molecular-beam epitaxy systems. United States: N. p., 2005. Web. doi:10.1116/1.2091119.
Oye, Michael M., Ahn, J., Cao, C., Chen, H., Fordyce, W., Gazula, D., Govindaraju, S., Hurst, J.B., Lipson, S., Lu, D., Reifsnider, J.M., Shchekin, O., Sidhu, R., Sun, X., Deppe, D.G., Holmes, A.L. Jr., & Mattord, Terry J. Use of glovebags for less hazardous working conditions during the maintenance operations on molecular-beam epitaxy systems. United States. doi:10.1116/1.2091119.
Oye, Michael M., Ahn, J., Cao, C., Chen, H., Fordyce, W., Gazula, D., Govindaraju, S., Hurst, J.B., Lipson, S., Lu, D., Reifsnider, J.M., Shchekin, O., Sidhu, R., Sun, X., Deppe, D.G., Holmes, A.L. Jr., and Mattord, Terry J. Tue . "Use of glovebags for less hazardous working conditions during the maintenance operations on molecular-beam epitaxy systems". United States. doi:10.1116/1.2091119.
@article{osti_20723219,
title = {Use of glovebags for less hazardous working conditions during the maintenance operations on molecular-beam epitaxy systems},
author = {Oye, Michael M. and Ahn, J. and Cao, C. and Chen, H. and Fordyce, W. and Gazula, D. and Govindaraju, S. and Hurst, J.B. and Lipson, S. and Lu, D. and Reifsnider, J.M. and Shchekin, O. and Sidhu, R. and Sun, X. and Deppe, D.G. and Holmes, A.L. Jr. and Mattord, Terry J.},
abstractNote = {No abstract prepared.},
doi = {10.1116/1.2091119},
journal = {Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films},
number = 6,
volume = 23,
place = {United States},
year = {Tue Nov 15 00:00:00 EST 2005},
month = {Tue Nov 15 00:00:00 EST 2005}
}