skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Simplified modeling of 13.5 nm unresolved transition array emission of a Sn plasma and comparison with experiment

Abstract

One key aspect in the drive to optimize the radiative output of a laser-produced plasma for extreme ultraviolet lithography is the radiation transport through the plasma. In tin-based plasmas, the radiation in the 2% bandwidth at 13.5 nm is predominantly due to 4d-4f and 4p-4d transitions from a range of tin ions (Sn{sup 7+} to Sn{sup 12+}). The complexity of the configurations involved in these transitions is such that a line-by-line analysis is, computationally, extremely intensive. This work seeks to model the emission profiles of each ion by treating the transition arrays statistically, thus greatly simplifying radiation transport modeling. The results of the model are compared with experimental spectra from tin-based laser-produced plasmas.

Authors:
; ; ; ; ; ;  [1]
  1. School of Physics, University College Dublin, Belfield, Dublin 4 (Ireland)
Publication Date:
OSTI Identifier:
20714138
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 98; Journal Issue: 11; Other Information: DOI: 10.1063/1.2128055; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; COMPARATIVE EVALUATIONS; EXTREME ULTRAVIOLET RADIATION; LASER-PRODUCED PLASMA; LASERS; MULTICHARGED IONS; PLASMA PRODUCTION; RADIATION TRANSPORT; SIMULATION; TIN; TIN IONS

Citation Formats

White, J., Hayden, P., Dunne, P., Cummings, A., Murphy, N., Sheridan, P., and O'Sullivan, G.. Simplified modeling of 13.5 nm unresolved transition array emission of a Sn plasma and comparison with experiment. United States: N. p., 2005. Web. doi:10.1063/1.2128055.
White, J., Hayden, P., Dunne, P., Cummings, A., Murphy, N., Sheridan, P., & O'Sullivan, G.. Simplified modeling of 13.5 nm unresolved transition array emission of a Sn plasma and comparison with experiment. United States. doi:10.1063/1.2128055.
White, J., Hayden, P., Dunne, P., Cummings, A., Murphy, N., Sheridan, P., and O'Sullivan, G.. Thu . "Simplified modeling of 13.5 nm unresolved transition array emission of a Sn plasma and comparison with experiment". United States. doi:10.1063/1.2128055.
@article{osti_20714138,
title = {Simplified modeling of 13.5 nm unresolved transition array emission of a Sn plasma and comparison with experiment},
author = {White, J. and Hayden, P. and Dunne, P. and Cummings, A. and Murphy, N. and Sheridan, P. and O'Sullivan, G.},
abstractNote = {One key aspect in the drive to optimize the radiative output of a laser-produced plasma for extreme ultraviolet lithography is the radiation transport through the plasma. In tin-based plasmas, the radiation in the 2% bandwidth at 13.5 nm is predominantly due to 4d-4f and 4p-4d transitions from a range of tin ions (Sn{sup 7+} to Sn{sup 12+}). The complexity of the configurations involved in these transitions is such that a line-by-line analysis is, computationally, extremely intensive. This work seeks to model the emission profiles of each ion by treating the transition arrays statistically, thus greatly simplifying radiation transport modeling. The results of the model are compared with experimental spectra from tin-based laser-produced plasmas.},
doi = {10.1063/1.2128055},
journal = {Journal of Applied Physics},
number = 11,
volume = 98,
place = {United States},
year = {Thu Dec 01 00:00:00 EST 2005},
month = {Thu Dec 01 00:00:00 EST 2005}
}