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Title: Transmission electron microscopy study on ion-beam-synthesized amorphous Fe-Si thin layers

Abstract

Ion-beam-synthesized amorphous Fe-Si thin layers have been characterized using transmission electron microscopy (TEM) in combination with imaging plate techniques. Si single crystals with a (111) orientation were irradiated with 120 keV Fe{sup +} ions to a fluence of 4.0x10{sup 17} cm{sup -2} at cryogenic temperature (120 K). Cross-sectional TEM observations indicated the formation of an amorphous bilayer on the topmost layer of the Si substrate. It was found that the upper layer is an amorphous Fe-Si with the composition, in terms of atomic ratio, of Fe/Si {approx}1/2, while the lower one is an amorphous Si. Atomic pair-distribution functions extracted from microbeam electron diffraction patterns revealed that the nature of short-range order in amorphous Fe-Si thin layer can be well described by the atomic arrangements of crystalline iron silicides.

Authors:
; ; ; ;  [1];  [2]
  1. Institute of Scientific and Industrial Research, Osaka University, Mihogaoka, Ibaraki, Osaka 567-0047 (Japan)
  2. (United States)
Publication Date:
OSTI Identifier:
20706487
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 87; Journal Issue: 24; Other Information: DOI: 10.1063/1.2142101; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; AMORPHOUS STATE; DISTRIBUTION FUNCTIONS; ELECTRON DIFFRACTION; ION BEAMS; IRON IONS; IRON SILICIDES; KEV RANGE 100-1000; LAYERS; MONOCRYSTALS; SUBSTRATES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY

Citation Formats

Naito, Muneyuki, Ishimaru, Manabu, Hirotsu, Yoshihiko, Valdez, James A., Sickafus, Kurt E., and Materials Science and Technology Division, Los Alamos National Laboratory, Los Alamos, New Mexico 87545. Transmission electron microscopy study on ion-beam-synthesized amorphous Fe-Si thin layers. United States: N. p., 2005. Web. doi:10.1063/1.2142101.
Naito, Muneyuki, Ishimaru, Manabu, Hirotsu, Yoshihiko, Valdez, James A., Sickafus, Kurt E., & Materials Science and Technology Division, Los Alamos National Laboratory, Los Alamos, New Mexico 87545. Transmission electron microscopy study on ion-beam-synthesized amorphous Fe-Si thin layers. United States. doi:10.1063/1.2142101.
Naito, Muneyuki, Ishimaru, Manabu, Hirotsu, Yoshihiko, Valdez, James A., Sickafus, Kurt E., and Materials Science and Technology Division, Los Alamos National Laboratory, Los Alamos, New Mexico 87545. Mon . "Transmission electron microscopy study on ion-beam-synthesized amorphous Fe-Si thin layers". United States. doi:10.1063/1.2142101.
@article{osti_20706487,
title = {Transmission electron microscopy study on ion-beam-synthesized amorphous Fe-Si thin layers},
author = {Naito, Muneyuki and Ishimaru, Manabu and Hirotsu, Yoshihiko and Valdez, James A. and Sickafus, Kurt E. and Materials Science and Technology Division, Los Alamos National Laboratory, Los Alamos, New Mexico 87545},
abstractNote = {Ion-beam-synthesized amorphous Fe-Si thin layers have been characterized using transmission electron microscopy (TEM) in combination with imaging plate techniques. Si single crystals with a (111) orientation were irradiated with 120 keV Fe{sup +} ions to a fluence of 4.0x10{sup 17} cm{sup -2} at cryogenic temperature (120 K). Cross-sectional TEM observations indicated the formation of an amorphous bilayer on the topmost layer of the Si substrate. It was found that the upper layer is an amorphous Fe-Si with the composition, in terms of atomic ratio, of Fe/Si {approx}1/2, while the lower one is an amorphous Si. Atomic pair-distribution functions extracted from microbeam electron diffraction patterns revealed that the nature of short-range order in amorphous Fe-Si thin layer can be well described by the atomic arrangements of crystalline iron silicides.},
doi = {10.1063/1.2142101},
journal = {Applied Physics Letters},
number = 24,
volume = 87,
place = {United States},
year = {Mon Dec 12 00:00:00 EST 2005},
month = {Mon Dec 12 00:00:00 EST 2005}
}