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Title: Application of a downstream calorimetric probe to reactive plasma

Abstract

We explore the application of calorimetric probe located downstream from the plasma zone. By positioning the probe in a downstream location, the probe signal can be correlated with the integral energy flux carried by the effluent species as they propagate downstream from the plasma zone. Because the integral energy flux channeled downstream depends on the plasma conditions, it is possible to infer the plasma conditions from the probe response even though the probe is located away from the plasma zone. A calorimetric probe, based on resistance-temperature detector principle, adequate for fluorine plasma exposure is constructed. Probe operation is demonstrated for NF{sub 3}-Ar plasmas.

Authors:
; ; ; ;  [1]
  1. ATMI, 7 Commerce Drive, Danbury, Connecticut 06810 (United States)
Publication Date:
OSTI Identifier:
20706464
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 87; Journal Issue: 23; Other Information: DOI: 10.1063/1.2140088; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ARGON; CALORIMETRY; FLUORINE; NITROGEN COMPOUNDS; PLASMA; POSITIONING

Citation Formats

Chen, I.-S., Neuner, Jeffery W., Chen, Philip S.H., Welch, James J., and DiMeo, Frank Jr. Application of a downstream calorimetric probe to reactive plasma. United States: N. p., 2005. Web. doi:10.1063/1.2140088.
Chen, I.-S., Neuner, Jeffery W., Chen, Philip S.H., Welch, James J., & DiMeo, Frank Jr. Application of a downstream calorimetric probe to reactive plasma. United States. doi:10.1063/1.2140088.
Chen, I.-S., Neuner, Jeffery W., Chen, Philip S.H., Welch, James J., and DiMeo, Frank Jr. Mon . "Application of a downstream calorimetric probe to reactive plasma". United States. doi:10.1063/1.2140088.
@article{osti_20706464,
title = {Application of a downstream calorimetric probe to reactive plasma},
author = {Chen, I.-S. and Neuner, Jeffery W. and Chen, Philip S.H. and Welch, James J. and DiMeo, Frank Jr.},
abstractNote = {We explore the application of calorimetric probe located downstream from the plasma zone. By positioning the probe in a downstream location, the probe signal can be correlated with the integral energy flux carried by the effluent species as they propagate downstream from the plasma zone. Because the integral energy flux channeled downstream depends on the plasma conditions, it is possible to infer the plasma conditions from the probe response even though the probe is located away from the plasma zone. A calorimetric probe, based on resistance-temperature detector principle, adequate for fluorine plasma exposure is constructed. Probe operation is demonstrated for NF{sub 3}-Ar plasmas.},
doi = {10.1063/1.2140088},
journal = {Applied Physics Letters},
number = 23,
volume = 87,
place = {United States},
year = {Mon Dec 05 00:00:00 EST 2005},
month = {Mon Dec 05 00:00:00 EST 2005}
}
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