Comment on 'Ion energy uniformity in high-frequency capacitive discharges' [Appl. Phys. Lett. 86, 021501 (2005)]
- Ecole Polytechnique Federale de Lausanne (EPFL), Centre de Recherches en Physique des Plasmas, CH-1015 Lausanne (Switzerland)
No abstract prepared.
- OSTI ID:
- 20702604
- Journal Information:
- Applied Physics Letters, Vol. 87, Issue 7; Other Information: DOI: 10.1063/1.2012528; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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