Self-focused electron beams from pyroelectric LiNbO{sub 3} crystals and their pattern-replication capability

Journal Article · Wed Dec 01 00:00:00 EST 2004 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.1809776· OSTI ID:20658120

Kim, Dong-Wook; Moon, C W; Jeong, Soo-Hwan; Yoo, In K ^[1]

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1. Samsung Advanced Institute of Technology, P.O. Box 111, Suwon, Kyongki 440-600 (Korea, Republic of)

We investigated the characteristics of electrons emitted from LiNbO{sub 3} single crystals using a current detector and a 1:1 electron projection system. Exposure to a poor vacuum of 10{sup -1} Torr restored the screening charges to the crystal during discharge and enabled reproducible electron emission within 1 min. We fabricated a patterned Si thin-film mask layer on a LiNbO{sub 3} crystal. As conducting thin films suppressed the pyroelectric electron emission from LiNbO{sub 3}, we could transfer the mask pattern of an array of 10-{mu}m dots to an electron-beam resist using the projection system. The electron beam from the crystal was highly self-focused, and the pattern replication needed neither an electric nor a magnetic field.

• OSTI ID: 20658120
• Journal Information: Journal of Applied Physics, Vol. 96, Issue 11; Other Information: DOI: 10.1063/1.1809776; (c) 2004 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
36 MATERIALS SCIENCE
43 PARTICLE ACCELERATORS
CHEMICAL VAPOR DEPOSITION
DIELECTRIC MATERIALS
ELECTRIC CHARGES
ELECTRON BEAMS
ELECTRON EMISSION
ELECTRONS
FOCUSING
LAYERS
LITHIUM COMPOUNDS
MAGNETIC FIELDS
MONOCRYSTALS
NIOBATES
NIOBIUM OXIDES
POLARIZATION
REPLICA TECHNIQUES
SEMICONDUCTOR MATERIALS
SILICON
TEMPERATURE DEPENDENCE
THIN FILMS