Electron cyclotron resonance deposition, structure, and properties of oxygen incorporated hydrogenated diamondlike amorphous carbon films

Journal Article · Mon Nov 15 00:00:00 EST 2004 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.1804624· OSTI ID:20658034

Adamopoulos, G; Godet, C; Zorba, T; Paraskevopoulos, K M; Ballutaud, D ^[1]

---

1. Laboratoire de Physique des Interfaces et des Couches Minces, Unite Mixte de Recherche 7647 Centre National de la Recherche Scientifique, Ecole Polytechnique, 91128 Palaiseau Cedex (France)

Oxygen-incorporated hydrogenated amorphous carbon films were grown by the integrated distributed electron cyclotron resonance plasma technique from a mixture of acetylene and oxygen. It has been found that the increase of the oxygen to acetylene gas ratio results in more oxygen incorporation up to O/(O+C)=0.2 with a decrease in the hydrogen concentration within the film as measured by the nuclear reaction analysis (NRA) and a combination of the elastic recoil detection analysis and Rutherford backscattering techniques. The spectroscopic ellipsometry in the range of 1.5-5 eV showed a negligible decrease of the E{sub 04} optical band gap for increasing the oxygen content. At the same time, the decrease of the refractive index from 2.2 to 2.0 denotes the decrease of the films density, which was independently estimated by NRA. The visible (488 nm) Raman spectroscopy showed that the increase of the oxygen content favors the clustering of the six-fold sp{sup 2}C rings. The Fourier transform infrared spectroscopy gives evidence of both C-O and C=O bonding configurations. No evidence of O-H bonds formation is found. Simultaneously, the chemisorption of CO{sub 2} seems to increased with increasing the oxygen to acetylene gas ratio, which is consistent with the lower film density. The previously trends denote the 'softening' of the films, which is consistent with the significant decrease (of about 35%) of the compressive stress allowing the growth of thicker but still transparent films.

• OSTI ID: 20658034
• Journal Information: Journal of Applied Physics, Vol. 96, Issue 10; Other Information: DOI: 10.1063/1.1804624; (c) 2004 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ACETYLENE
AMORPHOUS STATE
CARBON DIOXIDE
CHEMICAL BONDS
CHEMISORPTION
DEPOSITION
DIAMONDS
ELECTRON CYCLOTRON-RESONANCE
ELLIPSOMETRY
EV RANGE 01-10
FOURIER TRANSFORM SPECTROMETERS
FOURIER TRANSFORMATION
INFRARED SPECTRA
NUCLEAR REACTION ANALYSIS
OXYGEN
RAMAN SPECTRA
RAMAN SPECTROSCOPY
REFRACTIVE INDEX
RUTHERFORD BACKSCATTERING SPECTROSCOPY
THIN FILMS