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Title: A Linear Single-Crystal Bragg-Fresnel Lens With SiO2 Surface Structure

Abstract

Bragg-Fresnel lens (BFL) as thin silicon dioxide strips grown on the surface of perfect silicon crystal was designed, manufactured and experimentally tested. In this case the BFL structure consists of a set of silicon dioxide rectangular shape etched zones arranged by the Fresnel zone law. The stress within coated and uncoated crystal regions is opposite in sign, whether tensile or compressive. The strain in the substrate crystal lattice directly underneath discontinuities in the deposited film give rise to phase difference between waves diffracted from coated and uncoated crystal regions. This phase difference is known to be dependent on the thickness and composition of film and substrate. The focusing properties of Si/SiO2 BFLs with 107 zones and 0.3 micrometer outermost zone width were experimentally studied as a function of the silicon oxide thickness in the range of 100 - 400 nanometers. It was shown that deformation Bragg-Fresnel lenses could effectively focus hard X-rays to a linear focal spot of about 2 microns. The efficiency of focusing was found to be about 16% at energy 10 keV. The developed lens design is a promising approach to extend the angular range of focusing by Bragg-Fresnel optical elements and to avoid some drawbacks ofmore » BFL properties related to aspect-ratio dependent etching.« less

Authors:
;  [1]; ; ;  [2]
  1. Institute of Microelectronics Technology RAS, 142432 Chernogolovka Moscow distr. (Russian Federation)
  2. ESRF, BP220, F-38043 Grenoble Cedex (France)
Publication Date:
OSTI Identifier:
20653058
Resource Type:
Journal Article
Journal Name:
AIP Conference Proceedings
Additional Journal Information:
Journal Volume: 705; Journal Issue: 1; Conference: 8. international conference on synchrotron radiation instrumentation, San Francisco, CA (United States), 25-29 Aug 2003; Other Information: DOI: 10.1063/1.1757903; (c) 2004 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0094-243X
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ASPECT RATIO; BEAM OPTICS; BRAGG REFLECTION; CRYSTAL LATTICES; DIFFRACTION; ETCHING; FILMS; FOCUSING; FRESNEL LENS; HARD X RADIATION; KEV RANGE 10-100; MONOCRYSTALS; QUARTZ; SILICON; SILICON OXIDES; SUBSTRATES; SURFACES; SYNCHROTRON RADIATION; THICKNESS; ZONES

Citation Formats

Kuznetsov, S, Yunkin, V, Drakopoulos, M, Snigireva, I, and Snigirev, A. A Linear Single-Crystal Bragg-Fresnel Lens With SiO2 Surface Structure. United States: N. p., 2004. Web. doi:10.1063/1.1757903.
Kuznetsov, S, Yunkin, V, Drakopoulos, M, Snigireva, I, & Snigirev, A. A Linear Single-Crystal Bragg-Fresnel Lens With SiO2 Surface Structure. United States. https://doi.org/10.1063/1.1757903
Kuznetsov, S, Yunkin, V, Drakopoulos, M, Snigireva, I, and Snigirev, A. Wed . "A Linear Single-Crystal Bragg-Fresnel Lens With SiO2 Surface Structure". United States. https://doi.org/10.1063/1.1757903.
@article{osti_20653058,
title = {A Linear Single-Crystal Bragg-Fresnel Lens With SiO2 Surface Structure},
author = {Kuznetsov, S and Yunkin, V and Drakopoulos, M and Snigireva, I and Snigirev, A},
abstractNote = {Bragg-Fresnel lens (BFL) as thin silicon dioxide strips grown on the surface of perfect silicon crystal was designed, manufactured and experimentally tested. In this case the BFL structure consists of a set of silicon dioxide rectangular shape etched zones arranged by the Fresnel zone law. The stress within coated and uncoated crystal regions is opposite in sign, whether tensile or compressive. The strain in the substrate crystal lattice directly underneath discontinuities in the deposited film give rise to phase difference between waves diffracted from coated and uncoated crystal regions. This phase difference is known to be dependent on the thickness and composition of film and substrate. The focusing properties of Si/SiO2 BFLs with 107 zones and 0.3 micrometer outermost zone width were experimentally studied as a function of the silicon oxide thickness in the range of 100 - 400 nanometers. It was shown that deformation Bragg-Fresnel lenses could effectively focus hard X-rays to a linear focal spot of about 2 microns. The efficiency of focusing was found to be about 16% at energy 10 keV. The developed lens design is a promising approach to extend the angular range of focusing by Bragg-Fresnel optical elements and to avoid some drawbacks of BFL properties related to aspect-ratio dependent etching.},
doi = {10.1063/1.1757903},
url = {https://www.osti.gov/biblio/20653058}, journal = {AIP Conference Proceedings},
issn = {0094-243X},
number = 1,
volume = 705,
place = {United States},
year = {2004},
month = {5}
}