Sensitive detection of nanomechanical motion using piezoresistive signal downmixing
- Condensed Matter Physics 114-36, California Institute of Technology, Pasadena, California 91125 (United States)
We have developed a method of measuring rf-range resonance properties of nanoelectromechanical systems (NEMS) with integrated piezoresistive strain detectors serving as signal downmixers. The technique takes advantage of the high strain sensitivity of semiconductor-based piezoresistors, while overcoming the problem of rf signal attenuation due to a high source impedance. Our technique also greatly reduces the effect of the cross-talk between the detector and actuator circuits. We achieve thermomechanical noise detection of cantilever resonance modes up to 71 MHz at room temperature, demonstrating that downmixed piezoresistive signal detection is a viable high-sensitivity method of displacement detection in high-frequency NEMS.
- OSTI ID:
- 20637059
- Journal Information:
- Applied Physics Letters, Vol. 86, Issue 13; Other Information: DOI: 10.1063/1.1896103; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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