Ablation of organic polymers by 46.9-nm-laser radiation
- Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 21 Prague 8 (Czech Republic)
We report results of the exposure of poly(tetrafluoroethylene) -(PTFE), poly(methyl methacrylate) -(PMMA), and polyimide -(PI) to intense 46.9-nm-laser pulses of 1.2-ns-duration at fluences ranging from {approx}0.1 to {approx}10 J/cm{sup 2}. The ablation rates were found to be similar for all three materials, {approx}80-90 nm/pulse at 1 J/cm{sup 2}. The results suggest that the ablation of organic polymers induced by intense extreme ultraviolet laser radiation differs from that corresponding to irradiation with longer wavelengths.
- OSTI ID:
- 20636990
- Journal Information:
- Applied Physics Letters, Vol. 86, Issue 3; Other Information: DOI: 10.1063/1.1854741; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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