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Title: 320x256 solar-blind focal plane arrays based on Al{sub x}Ga{sub 1-x}N

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.1846936· OSTI ID:20636798
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  1. Center for Quantum Devices, Department of Electrical and Computer Engineering, Northwestern University, Evanston, Illinois 60208 (United States)

We report AlGaN-based backilluminated solar-blind ultraviolet focal plane arrays operating at a wavelength of 280 nm. The electrical characteristics of the individual pixels are discussed, and the uniformity of the array is presented. The p-i-n photodiode array was hybridized to a 320x256 read-out integrated circuit entirely within our university research lab, and a working 320x256 camera was demonstrated. Several example solar-blind images from the camera are also provided.

OSTI ID:
20636798
Journal Information:
Applied Physics Letters, Vol. 86, Issue 1; Other Information: DOI: 10.1063/1.1846936; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
Country of Publication:
United States
Language:
English