Leaky surface acoustic waves in Z-LiNbO{sub 3} substrates with epitaxial AIN overlays
- Department of Electrical, Computer, and Systems Engineering, Rensselaer Polytechnic Institute, 110 8th Street, Troy, New York 12180-3590 (United States)
The properties of leaky surface acoustic waves (LSAW) in MBE grown AIN layer on Z-cut LiNbO{sub 3} structures have been studied by numerical simulation and experimental measurements and compared with those of Rayleigh waves in the same structure. In the range of AIN layer thicknesses studied (0<kh<0.145) the measured velocity of LSAW propagating along the X axis of LiNbO{sub 3} substrate was essentially constant at around 4400 m/s. The measured electromechanical coupling coefficients (K{sup 2}) for the LSAW are roughly 1/4 of the predicted values, which might be due to the strong attenuation of the leaky wave unaccounted for during the parameter extraction. The thin AIN film slightly improved the measured temperature coefficient of frequency for the LSAW over that attained for the Z-cut, X-propagating LiNbO{sub 3} substrate alone.
- OSTI ID:
- 20634361
- Journal Information:
- Applied Physics Letters, Vol. 85, Issue 15; Other Information: DOI: 10.1063/1.1805705; (c) 2004 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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