Reliability of thin film nichrome resistors used on radiation hardened integrated circuits. Final report 19 Oct 71-19 Jun 72
The effects of corrosion, oxidation and interdiffusion on the reliability of thin film Ni-Cr resistors were studied. These properties were found to depend upon the composition and thickness of the films. The Ni-Cr thin films were found to be corrosion-resistant to salt solutions and to most acids with the exception of HF solutions and now Ni-Cr etches. From 'water drop' tests it was found that unpassivated resistors are subject to anodic dissolution at potentials above 2.5V. The Al metallization also dissolves at potentials above 0.5V. Passivation with 10K angstrom of SiO/sub 2/ protects the nichrome from anodic dissolution. The oxidationmore »