Experimental observation of a ''convective cell'' in electron phase space in an inductively coupled radio-frequency plasma

Journal Article · Mon Aug 28 00:00:00 EDT 2000 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.1289905· OSTI ID:20217408

Kortshagen, U ^[1]; Heil, B ^[1]

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1. Department of Mechanical Engineering, University of Minnesota, 111 Church Street S.E., Minneapolis, Minnesota 55455 (United States)

Spatially resolved two-dimensional Langmuir-probe measurements of energy-resolved electron fluxes have been performed in an inductively coupled radio-frequency plasma. A flux pattern reminiscent of a ''convection cell'' in energy-configuration space has been observed. The measurements are interpreted in terms of a total-energy picture of the plasma electrons. (c) 2000 American Institute of Physics.

• OSTI ID: 20217408
• Journal Information: Applied Physics Letters, Vol. 77, Issue 9; Other Information: PBD: 28 Aug 2000; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ELECTRON DENSITY
HIGH-FREQUENCY DISCHARGES
PHASE SPACE
DISTRIBUTION FUNCTIONS
POSITIVE COLUMN
ARGON
PLASMA RADIAL PROFILES
EXPERIMENTAL DATA