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Title: Surface texture and structure of ZnO films synthesized by off-axis sputtering deposition

Abstract

Morphology and structure of ZnO films deposited on (0001) sapphire and glass substrates by off-axis sputtering were investigated at various temperatures and pressures. All films show highly textured structures on glass substrates and epitaxial growth on sapphire substrates. The full width at half-maximum of theta rocking curves for epitaxial films is less than 0.5 degree sign . In textured films, it rises to several degrees. The trend of surface textures in films grown at low pressures is similar to those grown at high temperatures. A morphology transition from large well-defined hexagonal grains to flat surface was observed at a pressure of 50 mtorr and temperature of 550 degree sign C. The experiment results are explained by the transport behavior of depositing species. (c) 2000 Materials Research Society.

Authors:
 [1];  [2];  [2];  [3];  [4]
  1. Universities Space Research Association, NASA/Marshall Space Flight Center, Huntsville, Alabama 35812 (United States)
  2. Microgravity Science and Applications Department, NASA/Marshall Space Flight Center, Huntsville, Alabama 35812 (United States)
  3. Department of Chemistry, The University of Alabama, Huntsville, Alabama 35899 (United States)
  4. Solid State Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6056 (United States)
Publication Date:
OSTI Identifier:
20216863
Resource Type:
Journal Article
Journal Name:
Journal of Materials Research
Additional Journal Information:
Journal Volume: 15; Journal Issue: 5; Other Information: PBD: May 2000; Journal ID: ISSN 0884-2914
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; THIN FILMS; ZINC OXIDES; PHYSICAL VAPOR DEPOSITION; SUBSTRATES; SURFACES; TEXTURE; MICROSTRUCTURE; EXPERIMENTAL DATA

Citation Formats

Zhu, Shen, Su, C-H., Lehoczky, S. L., George, M. A., and Lowndes, D. H. Surface texture and structure of ZnO films synthesized by off-axis sputtering deposition. United States: N. p., 2000. Web. doi:10.1557/JMR.2000.0160.
Zhu, Shen, Su, C-H., Lehoczky, S. L., George, M. A., & Lowndes, D. H. Surface texture and structure of ZnO films synthesized by off-axis sputtering deposition. United States. doi:10.1557/JMR.2000.0160.
Zhu, Shen, Su, C-H., Lehoczky, S. L., George, M. A., and Lowndes, D. H. Mon . "Surface texture and structure of ZnO films synthesized by off-axis sputtering deposition". United States. doi:10.1557/JMR.2000.0160.
@article{osti_20216863,
title = {Surface texture and structure of ZnO films synthesized by off-axis sputtering deposition},
author = {Zhu, Shen and Su, C-H. and Lehoczky, S. L. and George, M. A. and Lowndes, D. H.},
abstractNote = {Morphology and structure of ZnO films deposited on (0001) sapphire and glass substrates by off-axis sputtering were investigated at various temperatures and pressures. All films show highly textured structures on glass substrates and epitaxial growth on sapphire substrates. The full width at half-maximum of theta rocking curves for epitaxial films is less than 0.5 degree sign . In textured films, it rises to several degrees. The trend of surface textures in films grown at low pressures is similar to those grown at high temperatures. A morphology transition from large well-defined hexagonal grains to flat surface was observed at a pressure of 50 mtorr and temperature of 550 degree sign C. The experiment results are explained by the transport behavior of depositing species. (c) 2000 Materials Research Society.},
doi = {10.1557/JMR.2000.0160},
journal = {Journal of Materials Research},
issn = {0884-2914},
number = 5,
volume = 15,
place = {United States},
year = {2000},
month = {5}
}