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Title: Field emission study of diamond-like carbon films with scanned-probe field-emission force microscopy

Abstract

Using a tip as an anode, a scanning force microscope (SFM) with an electrically conducting tip allows simultaneous measurement of both field-emitted currents and surface electronic properties with high lateral resolution. The principle of the method and its application to field emission from chemical vapor deposition diamond-like carbon films are presented. By simultaneously imaging the topography and field-emission current distribution with a 100 nm tip-surface separation, we correlated emission, topography, and dielectric properties. Subsequent contact SFM images of the same regions correlated topography and conductivity on the nanometer scale. The electrostatic force between tip and surface showed fluctuations on a millisecond time scale during field emission. This is probably due to charging and discharging of deep traps in the diamond-like carbon film. (c) 2000 American Institute of Physics.

Authors:
 [1];  [1];  [1]
  1. Materials Sciences Division, Lawrence Berkeley National Laboratory, University of California, Berkeley, California 94720 (United States)
Publication Date:
OSTI Identifier:
20216365
Resource Type:
Journal Article
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 76; Journal Issue: 20; Other Information: PBD: 15 May 2000; Journal ID: ISSN 0003-6951
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; CARBON; THIN FILMS; FIELD EMISSION; MICROSCOPY; CHEMICAL VAPOR DEPOSITION; DIELECTRIC PROPERTIES; ELECTRIC CONDUCTIVITY; ELECTROSTATICS; EXPERIMENTAL DATA

Citation Formats

Inoue, Takahito, Ogletree, D. Frank, and Salmeron, Miquel. Field emission study of diamond-like carbon films with scanned-probe field-emission force microscopy. United States: N. p., 2000. Web. doi:10.1063/1.126530.
Inoue, Takahito, Ogletree, D. Frank, & Salmeron, Miquel. Field emission study of diamond-like carbon films with scanned-probe field-emission force microscopy. United States. doi:10.1063/1.126530.
Inoue, Takahito, Ogletree, D. Frank, and Salmeron, Miquel. Mon . "Field emission study of diamond-like carbon films with scanned-probe field-emission force microscopy". United States. doi:10.1063/1.126530.
@article{osti_20216365,
title = {Field emission study of diamond-like carbon films with scanned-probe field-emission force microscopy},
author = {Inoue, Takahito and Ogletree, D. Frank and Salmeron, Miquel},
abstractNote = {Using a tip as an anode, a scanning force microscope (SFM) with an electrically conducting tip allows simultaneous measurement of both field-emitted currents and surface electronic properties with high lateral resolution. The principle of the method and its application to field emission from chemical vapor deposition diamond-like carbon films are presented. By simultaneously imaging the topography and field-emission current distribution with a 100 nm tip-surface separation, we correlated emission, topography, and dielectric properties. Subsequent contact SFM images of the same regions correlated topography and conductivity on the nanometer scale. The electrostatic force between tip and surface showed fluctuations on a millisecond time scale during field emission. This is probably due to charging and discharging of deep traps in the diamond-like carbon film. (c) 2000 American Institute of Physics.},
doi = {10.1063/1.126530},
journal = {Applied Physics Letters},
issn = {0003-6951},
number = 20,
volume = 76,
place = {United States},
year = {2000},
month = {5}
}