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Title: Highly charged ion based time-of-flight emission microscope

Abstract

An emission microscope using highly charged ions as the excitation source has been designed, constructed, and operated. A novel ''acorn'' objective lens has been used to simultaneously image electron and secondary ion emission. A resistive anode-position sensitive detector is used to determine the x-y position and time of arrival of the secondary events at the microscope image plane. Contrast in the image can be based on the intensity of the electron emission and/or the presence of particular secondary ions. Spatial resolution of better than 1 {mu}m and mass resolution m/{delta}m of better than 400 were demonstrated. Background rejection from uncorrelated events of greater than an order of magnitude is also achieved. (c) 2000 American Institute of Physics.

Authors:
 [1];  [1];  [1];  [1];  [1];  [1];  [1]
  1. Lawrence Livermore National Laboratory, University of California, Livermore, California 94551 (United States)
Publication Date:
OSTI Identifier:
20216354
Resource Type:
Journal Article
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 71; Journal Issue: 5; Other Information: PBD: May 2000; Journal ID: ISSN 0034-6748
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ELECTRON MICROSCOPES; ION MICROSCOPES; ELECTRON EMISSION; ION EMISSION; EXPERIMENTAL DATA; ION PROBES; PERFORMANCE; SPATIAL RESOLUTION

Citation Formats

Hamza, Alex V., Barnes, Alan V., Magee, Ed, Newman, Mike, Schenkel, Thomas, McDonald, Joseph W., and Schneider, Dieter H. Highly charged ion based time-of-flight emission microscope. United States: N. p., 2000. Web. doi:10.1063/1.1150582.
Hamza, Alex V., Barnes, Alan V., Magee, Ed, Newman, Mike, Schenkel, Thomas, McDonald, Joseph W., & Schneider, Dieter H. Highly charged ion based time-of-flight emission microscope. United States. doi:10.1063/1.1150582.
Hamza, Alex V., Barnes, Alan V., Magee, Ed, Newman, Mike, Schenkel, Thomas, McDonald, Joseph W., and Schneider, Dieter H. Mon . "Highly charged ion based time-of-flight emission microscope". United States. doi:10.1063/1.1150582.
@article{osti_20216354,
title = {Highly charged ion based time-of-flight emission microscope},
author = {Hamza, Alex V. and Barnes, Alan V. and Magee, Ed and Newman, Mike and Schenkel, Thomas and McDonald, Joseph W. and Schneider, Dieter H.},
abstractNote = {An emission microscope using highly charged ions as the excitation source has been designed, constructed, and operated. A novel ''acorn'' objective lens has been used to simultaneously image electron and secondary ion emission. A resistive anode-position sensitive detector is used to determine the x-y position and time of arrival of the secondary events at the microscope image plane. Contrast in the image can be based on the intensity of the electron emission and/or the presence of particular secondary ions. Spatial resolution of better than 1 {mu}m and mass resolution m/{delta}m of better than 400 were demonstrated. Background rejection from uncorrelated events of greater than an order of magnitude is also achieved. (c) 2000 American Institute of Physics.},
doi = {10.1063/1.1150582},
journal = {Review of Scientific Instruments},
issn = {0034-6748},
number = 5,
volume = 71,
place = {United States},
year = {2000},
month = {5}
}