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Title: Nanometer-scale electrochemical lithography on the spinel oxide LiMn{sub 2}O{sub 4}

Abstract

A scheme for nanometer-scale patterning of the surface of a conducting lithium manganese oxide (LiMn{sub 2}O{sub 4}) by scanning probe microscopy is described. A significant feature of this work is the demonstration that a localized surface chemical change can be confined to a depth which depends on the oxide-tip voltage bias and ambient humidity. Processing strategies exploiting this localized pattern generation vary from shallow surface property modification to localized etching of the oxide and the formation of nanometer-size pits, wells, or trenches. Unlike the scanning probe based surface oxidation of metals and semiconductors, the electroactive material is altered via electrochemically generated species. (c) 2000 American Institute of Physics.

Authors:
 [1];  [1]
  1. Lawrence Berkeley National Laboratory, Environmental Energy Technologies Division, 1 Cyclotron Rd., Berkeley, California 94720 (United States)
Publication Date:
OSTI Identifier:
20216176
Resource Type:
Journal Article
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 76; Journal Issue: 18; Other Information: PBD: 1 May 2000; Journal ID: ISSN 0003-6951
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; LITHIUM OXIDES; MANGANESE OXIDES; ELECTROCHEMISTRY; SPINELS; ELECTRON MICROSCOPY; ETCHING; SURFACES; EXPERIMENTAL DATA

Citation Formats

Kostecki, Robert, and McLarnon, Frank. Nanometer-scale electrochemical lithography on the spinel oxide LiMn{sub 2}O{sub 4}. United States: N. p., 2000. Web. doi:10.1063/1.126400.
Kostecki, Robert, & McLarnon, Frank. Nanometer-scale electrochemical lithography on the spinel oxide LiMn{sub 2}O{sub 4}. United States. doi:10.1063/1.126400.
Kostecki, Robert, and McLarnon, Frank. Mon . "Nanometer-scale electrochemical lithography on the spinel oxide LiMn{sub 2}O{sub 4}". United States. doi:10.1063/1.126400.
@article{osti_20216176,
title = {Nanometer-scale electrochemical lithography on the spinel oxide LiMn{sub 2}O{sub 4}},
author = {Kostecki, Robert and McLarnon, Frank},
abstractNote = {A scheme for nanometer-scale patterning of the surface of a conducting lithium manganese oxide (LiMn{sub 2}O{sub 4}) by scanning probe microscopy is described. A significant feature of this work is the demonstration that a localized surface chemical change can be confined to a depth which depends on the oxide-tip voltage bias and ambient humidity. Processing strategies exploiting this localized pattern generation vary from shallow surface property modification to localized etching of the oxide and the formation of nanometer-size pits, wells, or trenches. Unlike the scanning probe based surface oxidation of metals and semiconductors, the electroactive material is altered via electrochemically generated species. (c) 2000 American Institute of Physics.},
doi = {10.1063/1.126400},
journal = {Applied Physics Letters},
issn = {0003-6951},
number = 18,
volume = 76,
place = {United States},
year = {2000},
month = {5}
}